JPS5442698A - Piezooelectric crystalline membrane of zinc oxide - Google Patents

Piezooelectric crystalline membrane of zinc oxide

Info

Publication number
JPS5442698A
JPS5442698A JP10925877A JP10925877A JPS5442698A JP S5442698 A JPS5442698 A JP S5442698A JP 10925877 A JP10925877 A JP 10925877A JP 10925877 A JP10925877 A JP 10925877A JP S5442698 A JPS5442698 A JP S5442698A
Authority
JP
Japan
Prior art keywords
piezooelectric
zinc oxide
crystalline membrane
crystalline
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10925877A
Other languages
Japanese (ja)
Other versions
JPS5746233B2 (en
Inventor
Toshio Ogawa
Tasuku Masuo
Kouji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP10925877A priority Critical patent/JPS5442698A/en
Priority to DE2811044A priority patent/DE2811044C3/en
Priority to US05/886,821 priority patent/US4151324A/en
Publication of JPS5442698A publication Critical patent/JPS5442698A/en
Publication of JPS5746233B2 publication Critical patent/JPS5746233B2/ja
Granted legal-status Critical Current

Links

JP10925877A 1977-03-16 1977-09-09 Piezooelectric crystalline membrane of zinc oxide Granted JPS5442698A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP10925877A JPS5442698A (en) 1977-09-09 1977-09-09 Piezooelectric crystalline membrane of zinc oxide
DE2811044A DE2811044C3 (en) 1977-03-16 1978-03-14 Piezoelectric Crystalline Films
US05/886,821 US4151324A (en) 1977-03-16 1978-03-15 Piezoelectric crystalline films and method of preparing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10925877A JPS5442698A (en) 1977-09-09 1977-09-09 Piezooelectric crystalline membrane of zinc oxide

Publications (2)

Publication Number Publication Date
JPS5442698A true JPS5442698A (en) 1979-04-04
JPS5746233B2 JPS5746233B2 (en) 1982-10-01

Family

ID=14505607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10925877A Granted JPS5442698A (en) 1977-03-16 1977-09-09 Piezooelectric crystalline membrane of zinc oxide

Country Status (1)

Country Link
JP (1) JPS5442698A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007302508A (en) * 2006-05-11 2007-11-22 Sumitomo Metal Mining Co Ltd Oxide sintered compact, target and transparent conductive film using the same
JP2009263709A (en) * 2008-04-24 2009-11-12 Hitachi Ltd Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target,

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007302508A (en) * 2006-05-11 2007-11-22 Sumitomo Metal Mining Co Ltd Oxide sintered compact, target and transparent conductive film using the same
JP2009263709A (en) * 2008-04-24 2009-11-12 Hitachi Ltd Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target,

Also Published As

Publication number Publication date
JPS5746233B2 (en) 1982-10-01

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