JPS5442698A - Piezooelectric crystalline membrane of zinc oxide - Google Patents
Piezooelectric crystalline membrane of zinc oxideInfo
- Publication number
- JPS5442698A JPS5442698A JP10925877A JP10925877A JPS5442698A JP S5442698 A JPS5442698 A JP S5442698A JP 10925877 A JP10925877 A JP 10925877A JP 10925877 A JP10925877 A JP 10925877A JP S5442698 A JPS5442698 A JP S5442698A
- Authority
- JP
- Japan
- Prior art keywords
- piezooelectric
- zinc oxide
- crystalline membrane
- crystalline
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10925877A JPS5442698A (en) | 1977-09-09 | 1977-09-09 | Piezooelectric crystalline membrane of zinc oxide |
DE2811044A DE2811044C3 (en) | 1977-03-16 | 1978-03-14 | Piezoelectric Crystalline Films |
US05/886,821 US4151324A (en) | 1977-03-16 | 1978-03-15 | Piezoelectric crystalline films and method of preparing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10925877A JPS5442698A (en) | 1977-09-09 | 1977-09-09 | Piezooelectric crystalline membrane of zinc oxide |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5442698A true JPS5442698A (en) | 1979-04-04 |
JPS5746233B2 JPS5746233B2 (en) | 1982-10-01 |
Family
ID=14505607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10925877A Granted JPS5442698A (en) | 1977-03-16 | 1977-09-09 | Piezooelectric crystalline membrane of zinc oxide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5442698A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007302508A (en) * | 2006-05-11 | 2007-11-22 | Sumitomo Metal Mining Co Ltd | Oxide sintered compact, target and transparent conductive film using the same |
JP2009263709A (en) * | 2008-04-24 | 2009-11-12 | Hitachi Ltd | Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target, |
-
1977
- 1977-09-09 JP JP10925877A patent/JPS5442698A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007302508A (en) * | 2006-05-11 | 2007-11-22 | Sumitomo Metal Mining Co Ltd | Oxide sintered compact, target and transparent conductive film using the same |
JP2009263709A (en) * | 2008-04-24 | 2009-11-12 | Hitachi Ltd | Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target, |
Also Published As
Publication number | Publication date |
---|---|
JPS5746233B2 (en) | 1982-10-01 |
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