JPS5445798A - Piezooelectric crystalline membrane of zinc oxide - Google Patents

Piezooelectric crystalline membrane of zinc oxide

Info

Publication number
JPS5445798A
JPS5445798A JP11176377A JP11176377A JPS5445798A JP S5445798 A JPS5445798 A JP S5445798A JP 11176377 A JP11176377 A JP 11176377A JP 11176377 A JP11176377 A JP 11176377A JP S5445798 A JPS5445798 A JP S5445798A
Authority
JP
Japan
Prior art keywords
piezooelectric
zinc oxide
crystalline membrane
crystalline
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11176377A
Other languages
Japanese (ja)
Other versions
JPS5831745B2 (en
Inventor
Toshio Ogawa
Tasuku Masuo
Kouji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP52111763A priority Critical patent/JPS5831745B2/en
Priority to US05/940,336 priority patent/US4174421A/en
Priority to DE19782839577 priority patent/DE2839577A1/en
Publication of JPS5445798A publication Critical patent/JPS5445798A/en
Publication of JPS5831745B2 publication Critical patent/JPS5831745B2/en
Expired legal-status Critical Current

Links

JP52111763A 1977-09-13 1977-09-17 Zinc oxide piezoelectric crystal film Expired JPS5831745B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP52111763A JPS5831745B2 (en) 1977-09-17 1977-09-17 Zinc oxide piezoelectric crystal film
US05/940,336 US4174421A (en) 1977-09-13 1978-09-07 Piezoelectric crystalline film of zinc oxide and method for making same
DE19782839577 DE2839577A1 (en) 1977-09-13 1978-09-12 ZINC OXYDE PIEZOELECTRIC CRYSTALLINE FILMS AND THE PROCESS FOR THEIR PRODUCTION

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52111763A JPS5831745B2 (en) 1977-09-17 1977-09-17 Zinc oxide piezoelectric crystal film

Publications (2)

Publication Number Publication Date
JPS5445798A true JPS5445798A (en) 1979-04-11
JPS5831745B2 JPS5831745B2 (en) 1983-07-08

Family

ID=14569559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52111763A Expired JPS5831745B2 (en) 1977-09-13 1977-09-17 Zinc oxide piezoelectric crystal film

Country Status (1)

Country Link
JP (1) JPS5831745B2 (en)

Also Published As

Publication number Publication date
JPS5831745B2 (en) 1983-07-08

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