JPS5442697A - Piezooelectric crystalline membrane of zinc oxide - Google Patents
Piezooelectric crystalline membrane of zinc oxideInfo
- Publication number
- JPS5442697A JPS5442697A JP10925777A JP10925777A JPS5442697A JP S5442697 A JPS5442697 A JP S5442697A JP 10925777 A JP10925777 A JP 10925777A JP 10925777 A JP10925777 A JP 10925777A JP S5442697 A JPS5442697 A JP S5442697A
- Authority
- JP
- Japan
- Prior art keywords
- piezooelectric
- zinc oxide
- crystalline membrane
- crystalline
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title 2
- 239000012528 membrane Substances 0.000 title 1
- 239000011787 zinc oxide Substances 0.000 title 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10925777A JPS5442697A (en) | 1977-09-09 | 1977-09-09 | Piezooelectric crystalline membrane of zinc oxide |
DE2811044A DE2811044C3 (en) | 1977-03-16 | 1978-03-14 | Piezoelectric Crystalline Films |
US05/886,821 US4151324A (en) | 1977-03-16 | 1978-03-15 | Piezoelectric crystalline films and method of preparing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10925777A JPS5442697A (en) | 1977-09-09 | 1977-09-09 | Piezooelectric crystalline membrane of zinc oxide |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5442697A true JPS5442697A (en) | 1979-04-04 |
JPS5746232B2 JPS5746232B2 (en) | 1982-10-01 |
Family
ID=14505582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10925777A Granted JPS5442697A (en) | 1977-03-16 | 1977-09-09 | Piezooelectric crystalline membrane of zinc oxide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5442697A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009263709A (en) * | 2008-04-24 | 2009-11-12 | Hitachi Ltd | Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target, |
-
1977
- 1977-09-09 JP JP10925777A patent/JPS5442697A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009263709A (en) * | 2008-04-24 | 2009-11-12 | Hitachi Ltd | Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target, |
Also Published As
Publication number | Publication date |
---|---|
JPS5746232B2 (en) | 1982-10-01 |
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