JPS5443600A - Piezooelectric crystalline membrane of zinc oxide - Google Patents

Piezooelectric crystalline membrane of zinc oxide

Info

Publication number
JPS5443600A
JPS5443600A JP11089477A JP11089477A JPS5443600A JP S5443600 A JPS5443600 A JP S5443600A JP 11089477 A JP11089477 A JP 11089477A JP 11089477 A JP11089477 A JP 11089477A JP S5443600 A JPS5443600 A JP S5443600A
Authority
JP
Japan
Prior art keywords
piezooelectric
zinc oxide
crystalline membrane
crystalline
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11089477A
Other languages
Japanese (ja)
Other versions
JPS5831741B2 (en
Inventor
Toshio Ogawa
Tasuku Masuo
Kouji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP52110894A priority Critical patent/JPS5831741B2/en
Priority to US05/940,336 priority patent/US4174421A/en
Priority to DE19782839577 priority patent/DE2839577A1/en
Publication of JPS5443600A publication Critical patent/JPS5443600A/en
Publication of JPS5831741B2 publication Critical patent/JPS5831741B2/en
Expired legal-status Critical Current

Links

JP52110894A 1977-09-13 1977-09-13 Zinc oxide piezoelectric crystal film Expired JPS5831741B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP52110894A JPS5831741B2 (en) 1977-09-13 1977-09-13 Zinc oxide piezoelectric crystal film
US05/940,336 US4174421A (en) 1977-09-13 1978-09-07 Piezoelectric crystalline film of zinc oxide and method for making same
DE19782839577 DE2839577A1 (en) 1977-09-13 1978-09-12 ZINC OXYDE PIEZOELECTRIC CRYSTALLINE FILMS AND THE PROCESS FOR THEIR PRODUCTION

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52110894A JPS5831741B2 (en) 1977-09-13 1977-09-13 Zinc oxide piezoelectric crystal film

Publications (2)

Publication Number Publication Date
JPS5443600A true JPS5443600A (en) 1979-04-06
JPS5831741B2 JPS5831741B2 (en) 1983-07-08

Family

ID=14547373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52110894A Expired JPS5831741B2 (en) 1977-09-13 1977-09-13 Zinc oxide piezoelectric crystal film

Country Status (1)

Country Link
JP (1) JPS5831741B2 (en)

Also Published As

Publication number Publication date
JPS5831741B2 (en) 1983-07-08

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