JPS5443599A - Piezooelectric crystalline membrane of zinc oxide - Google Patents

Piezooelectric crystalline membrane of zinc oxide

Info

Publication number
JPS5443599A
JPS5443599A JP11089377A JP11089377A JPS5443599A JP S5443599 A JPS5443599 A JP S5443599A JP 11089377 A JP11089377 A JP 11089377A JP 11089377 A JP11089377 A JP 11089377A JP S5443599 A JPS5443599 A JP S5443599A
Authority
JP
Japan
Prior art keywords
piezooelectric
zinc oxide
crystalline membrane
crystalline
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11089377A
Other languages
Japanese (ja)
Other versions
JPS5831740B2 (en
Inventor
Toshio Ogawa
Tasuku Masuo
Kouji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP52110893A priority Critical patent/JPS5831740B2/en
Publication of JPS5443599A publication Critical patent/JPS5443599A/en
Publication of JPS5831740B2 publication Critical patent/JPS5831740B2/en
Expired legal-status Critical Current

Links

JP52110893A 1977-09-13 1977-09-13 Zinc oxide piezoelectric crystal film Expired JPS5831740B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52110893A JPS5831740B2 (en) 1977-09-13 1977-09-13 Zinc oxide piezoelectric crystal film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52110893A JPS5831740B2 (en) 1977-09-13 1977-09-13 Zinc oxide piezoelectric crystal film

Publications (2)

Publication Number Publication Date
JPS5443599A true JPS5443599A (en) 1979-04-06
JPS5831740B2 JPS5831740B2 (en) 1983-07-08

Family

ID=14547349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52110893A Expired JPS5831740B2 (en) 1977-09-13 1977-09-13 Zinc oxide piezoelectric crystal film

Country Status (1)

Country Link
JP (1) JPS5831740B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57146713A (en) * 1981-03-09 1982-09-10 Akira Endo Hypoglycemic
US4913657A (en) * 1988-04-15 1990-04-03 Teikoku Sen-I Co., Ltd. Coupling for fire hose with built-in communication cable

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57146713A (en) * 1981-03-09 1982-09-10 Akira Endo Hypoglycemic
US4913657A (en) * 1988-04-15 1990-04-03 Teikoku Sen-I Co., Ltd. Coupling for fire hose with built-in communication cable

Also Published As

Publication number Publication date
JPS5831740B2 (en) 1983-07-08

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