JPS5447147A - Vacuum cooling device - Google Patents

Vacuum cooling device

Info

Publication number
JPS5447147A
JPS5447147A JP11272877A JP11272877A JPS5447147A JP S5447147 A JPS5447147 A JP S5447147A JP 11272877 A JP11272877 A JP 11272877A JP 11272877 A JP11272877 A JP 11272877A JP S5447147 A JPS5447147 A JP S5447147A
Authority
JP
Japan
Prior art keywords
water components
tub
components absorbing
vaccum
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11272877A
Other languages
Japanese (ja)
Inventor
Kazunari Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Plant Technologies Ltd
Original Assignee
Hitachi Plant Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Technologies Ltd filed Critical Hitachi Plant Technologies Ltd
Priority to JP11272877A priority Critical patent/JPS5447147A/en
Publication of JPS5447147A publication Critical patent/JPS5447147A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To render a cooling machinery for cold trap unnecessary and decrease the plottage and the amount of electric power consumption by providing a water components absorbing tower in a tubular path between a vaccum tub and a vacuum pump.
CONSTITUTION: In a tubular path 2 between a vacuum tub 1 and a vacuum pump 11 is provided a water components absorbing tower 5 in which a water components absorbing agent such as silica gel, activated aluminum, phosphorous pentoxide, potassium hydroxide, calcuim chloride or the like is stored and a regenerative heater 6 is provided. By so doing, if any moistened object to be cooled is introduced in the vaccum tub and the vaccum pump 11 is operated, the water in the object evaporates in correspondence with the sucking out of the air in the vacuum tub 1 and thus the cooling is effected. And, the vapour as the result of the generation of evaporation is introduced into the water components absorbing tower 5 and then absorbed by the water components absorbing agent, and the water components absorbing agent which has absorbed the water components is regenerated by the application of heat by the regenerative heater 6. Accordingly, the cooling machinery for cold trap becomes unnecessary and thus the primary purpose can be achieved
COPYRIGHT: (C)1979,JPO&Japio
JP11272877A 1977-09-21 1977-09-21 Vacuum cooling device Pending JPS5447147A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11272877A JPS5447147A (en) 1977-09-21 1977-09-21 Vacuum cooling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11272877A JPS5447147A (en) 1977-09-21 1977-09-21 Vacuum cooling device

Publications (1)

Publication Number Publication Date
JPS5447147A true JPS5447147A (en) 1979-04-13

Family

ID=14594044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11272877A Pending JPS5447147A (en) 1977-09-21 1977-09-21 Vacuum cooling device

Country Status (1)

Country Link
JP (1) JPS5447147A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003110312A (en) * 2001-09-28 2003-04-11 Tokyo Electron Ltd Matching unit and plasma processing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003110312A (en) * 2001-09-28 2003-04-11 Tokyo Electron Ltd Matching unit and plasma processing device

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