JPS5444636B2 - - Google Patents
Info
- Publication number
- JPS5444636B2 JPS5444636B2 JP8595676A JP8595676A JPS5444636B2 JP S5444636 B2 JPS5444636 B2 JP S5444636B2 JP 8595676 A JP8595676 A JP 8595676A JP 8595676 A JP8595676 A JP 8595676A JP S5444636 B2 JPS5444636 B2 JP S5444636B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8595676A JPS5312274A (en) | 1976-07-21 | 1976-07-21 | Production of mask for x-ray exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8595676A JPS5312274A (en) | 1976-07-21 | 1976-07-21 | Production of mask for x-ray exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5312274A JPS5312274A (en) | 1978-02-03 |
JPS5444636B2 true JPS5444636B2 (ja) | 1979-12-27 |
Family
ID=13873189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8595676A Granted JPS5312274A (en) | 1976-07-21 | 1976-07-21 | Production of mask for x-ray exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5312274A (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5688137A (en) * | 1979-12-21 | 1981-07-17 | Fujitsu Ltd | X-ray transfer mask |
JPS5892732U (ja) * | 1981-12-16 | 1983-06-23 | 株式会社日立製作所 | 軟x線リソグラフイ−用マスク |
DE3245868A1 (de) * | 1982-12-11 | 1984-06-14 | EUROSIL electronic GmbH, 8057 Eching | Thermisch unempfindliche bestrahlungsmaske fuer roentgenlithographie und verfahren zur herstellung derartiger masken |
JPS6169133A (ja) * | 1985-05-07 | 1986-04-09 | Chiyou Lsi Gijutsu Kenkyu Kumiai | 軟x線露光方法 |
JPS62151737U (ja) * | 1987-02-25 | 1987-09-26 | ||
JPS62151736U (ja) * | 1987-02-25 | 1987-09-26 | ||
JPH0473765A (ja) * | 1990-07-16 | 1992-03-09 | Toshiba Corp | X線透過膜およびその製法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5155675A (en) * | 1974-11-11 | 1976-05-15 | Fujitsu Ltd | Etsukususenkaisetsu nyoru ichiawasehoho |
JPS52117557A (en) * | 1976-03-30 | 1977-10-03 | Toshiba Corp | Soft x-ray exposure mask and its manufacturing method |
JPS52117558A (en) * | 1976-03-30 | 1977-10-03 | Toshiba Corp | Soft x-ray exposure mask and its manufacturing method |
-
1976
- 1976-07-21 JP JP8595676A patent/JPS5312274A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5155675A (en) * | 1974-11-11 | 1976-05-15 | Fujitsu Ltd | Etsukususenkaisetsu nyoru ichiawasehoho |
JPS52117557A (en) * | 1976-03-30 | 1977-10-03 | Toshiba Corp | Soft x-ray exposure mask and its manufacturing method |
JPS52117558A (en) * | 1976-03-30 | 1977-10-03 | Toshiba Corp | Soft x-ray exposure mask and its manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
JPS5312274A (en) | 1978-02-03 |