JPS5441078A - Device for inspecting semiconductor - Google Patents

Device for inspecting semiconductor

Info

Publication number
JPS5441078A
JPS5441078A JP10807677A JP10807677A JPS5441078A JP S5441078 A JPS5441078 A JP S5441078A JP 10807677 A JP10807677 A JP 10807677A JP 10807677 A JP10807677 A JP 10807677A JP S5441078 A JPS5441078 A JP S5441078A
Authority
JP
Japan
Prior art keywords
inspecting semiconductor
inspecting
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10807677A
Other languages
Japanese (ja)
Other versions
JPS567294B2 (en
Inventor
Hirohiko Ubukata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOBATORON KK
Original Assignee
KOBATORON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOBATORON KK filed Critical KOBATORON KK
Priority to JP10807677A priority Critical patent/JPS5441078A/en
Priority to US05/928,711 priority patent/US4219110A/en
Publication of JPS5441078A publication Critical patent/JPS5441078A/en
Publication of JPS567294B2 publication Critical patent/JPS567294B2/ja
Granted legal-status Critical Current

Links

JP10807677A 1977-09-08 1977-09-08 Device for inspecting semiconductor Granted JPS5441078A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10807677A JPS5441078A (en) 1977-09-08 1977-09-08 Device for inspecting semiconductor
US05/928,711 US4219110A (en) 1977-09-08 1978-07-27 Wafer probe apparatus with pneumatic wafer orienting mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10807677A JPS5441078A (en) 1977-09-08 1977-09-08 Device for inspecting semiconductor

Publications (2)

Publication Number Publication Date
JPS5441078A true JPS5441078A (en) 1979-03-31
JPS567294B2 JPS567294B2 (en) 1981-02-17

Family

ID=14475259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10807677A Granted JPS5441078A (en) 1977-09-08 1977-09-08 Device for inspecting semiconductor

Country Status (1)

Country Link
JP (1) JPS5441078A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626492A (en) * 1979-08-13 1981-03-14 Matsushita Electric Ind Co Ltd Device for mouting cylindrical leadless electronic part
JPS5776461A (en) * 1980-10-31 1982-05-13 Ushio Inc Device for maintaining constant temperature of flat body
JPS5871808U (en) * 1981-11-10 1983-05-16 株式会社明電舎 Wireless guidance device for unmanned vehicles

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (en) * 1973-03-07 1974-11-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (en) * 1973-03-07 1974-11-05

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626492A (en) * 1979-08-13 1981-03-14 Matsushita Electric Ind Co Ltd Device for mouting cylindrical leadless electronic part
JPS6214120B2 (en) * 1979-08-13 1987-03-31 Matsushita Electric Ind Co Ltd
JPS5776461A (en) * 1980-10-31 1982-05-13 Ushio Inc Device for maintaining constant temperature of flat body
JPS6334989B2 (en) * 1980-10-31 1988-07-13 Ushio Electric Inc
JPS5871808U (en) * 1981-11-10 1983-05-16 株式会社明電舎 Wireless guidance device for unmanned vehicles
JPS6227921Y2 (en) * 1981-11-10 1987-07-17

Also Published As

Publication number Publication date
JPS567294B2 (en) 1981-02-17

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