JPS6334989B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a planar body constant temperature device for maintaining a relatively thin planar body at a constant temperature for, for example, testing characteristics.

In general, it is necessary to electrically test the operating characteristics of solar cells that are constructed as thin planar bodies. The current-voltage characteristics, etc. of the solar cell are measured.
However, the temperature of the solar cell gradually increases as the light irradiation time passes, but in order to achieve highly reliable testing, it is necessary to maintain the solar cell at a constant temperature during the testing period. It is essential.

A constant temperature device is used in response to such requirements, but conventional constant temperature devices have the disadvantage that they cannot always achieve a satisfactory constant temperature effect, especially for planar objects with a large area. However, there are drawbacks such as difficulty in maintaining high accuracy.

For example, Japanese Patent Application Laid-Open No. 55-21158 describes that a semiconductor device is vacuum-adsorbed onto a heating plate whose temperature is controlled by a temperature control unit. Since the plate has no cooling function at all, when the temperature gets too high, it only stops generating heat and has to wait for the temperature to drop due to natural heat dissipation. Control accuracy is low.

Based on the above-mentioned circumstances, the present invention is capable of stably maintaining the entire target planar object at a desired constant temperature with high accuracy even if the planar object has a large area. The purpose of the present invention is to provide a planar body constant temperature device.

An embodiment of the present invention will be described below with reference to the drawings.

In the present invention, as shown in FIGS. 1 and 2, a flat surface 1 made of metal such as copper, etc.
A holding plate 2 is provided, and this holding plate 2 is formed with chuck holes 3, 3, .
Connect to. Hole 3 for each chuck in the example shown
The through hole 3A formed in the retaining plate 2 and the retaining plate 2
A groove 3B is formed along the surface of the through hole 3A to communicate with the through hole 3A. 5 is a peeling groove extending from the periphery to the center of the holding plate 2.

A thermomodule 6 is provided on the back surface of the holding plate 2 having such a structure so that one surface thereof is in close contact with the other surface. This thermomodule 6 is a plate-shaped body in which a large number of Bertier effect elements are aligned in the same direction, and when a current is passed in one direction, heat is absorbed on one surface and heat is generated on the other surface depending on the current value. , has the function of reversing the heat-absorbing surface and the heat-generating surface when a current is passed in the opposite direction. A water passage 7 is formed on the other side of the thermomodule 6 so as to be in contact therewith, and a water supply mechanism (not shown) is connected to this.

On the other hand, a set temperature at which the holding plate 2 should be maintained;
A current supply mechanism is provided which compares the actual temperature of the holding plate 2 and supplies a current with controlled polarity and current value to the thermomodule 6. FIG. 3 is a circuit diagram of one example, and one of the two input terminals of the differential amplifier 8 is provided with a resistor made of, for example, a platinum wire, which is embedded in the holding plate 2 as shown in FIG. A thermometer 9 is connected, and a temperature setting reference voltage source 10 is connected to the other input terminal. The thermomodule 6 is connected to the output terminal of the differential amplifier 8 via an amplifier 11 made up of, for example, a push-pull circuit, and the thermomodule 6 is connected to the output terminal of the differential amplifier 8 via an amplifier 11 formed of a push-pull circuit. The polarity of the voltage applied to the Yule 6 is controlled, and a current of a magnitude corresponding to the magnitude of the difference between the voltage of the reference voltage source 10 and the voltage from the resistance thermometer 8 is energized to the thermomodule 6. do.

In the figure, 12 is a side edge positioning mechanism of the planar body, and 13 is a mechanism for positioning the edge of the planar body, but these are omitted in FIG. 14 is an abutment.

The planar object constant temperature device of the present invention has the above-mentioned configuration, and by positioning the target planar object on the holding plate 2 and driving the pressure reducing mechanism connected to the chuck hole 3, the chuck is heated. The planar body is held in close contact with the surface 1 of the holding plate 2 by the negative pressure acting on the use hole 3. Then, when the current supply mechanism is driven while water is flowing through the water passage 7, when the temperature of the holding plate 2 is higher than the set temperature, a current of a size corresponding to the temperature difference is applied to the thermostat in contact with the holding plate 2. When the thermo module 6 is supplied in a direction in which one side of the module becomes an endothermic surface, the planar body is thereby cooled through the holding plate 2, and conversely, the temperature of the holding plate 2 becomes lower. At this time, the holding plate 2 is heated by the thermo module 6 according to the degree of heating. In this way, by actively performing both the heating and cooling actions of the planar body, it is possible to always achieve high-precision temperature control with a high response speed, and to maintain the holding plate 2 at the set temperature with high precision. As a result, even for a planar object with a large area, the entire surface can be maintained at a uniform temperature with high precision.

Since the target planar object has a small thickness and is held in close contact with the surface 1 of the holding plate 2 made of a good thermal conductor by means of a vacuum chuck, the temperature state of the object is controlled by the holding plate 2. A constant temperature condition substantially equal to 2 can be maintained for any length of time. Moreover, since the thermomodule 6 can be easily obtained with a desired area and the retaining plate 2 is made of a good thermal conductor,
Even if the planar body is vast, the entire surface can be maintained at a uniform, desired temperature.

As a result of the above-mentioned effects, when a solar cell is used as a target planar object, even if it is irradiated with light that causes a temperature rise, the solar cell will not experience a temperature rise of, for example, 20°C. It is possible to maintain a constant constant temperature state.

By allowing water to flow through the water passage 7, the temperature state of the other surface of the thermomodule 6 can be maintained in a stable state at a substantially constant temperature without large fluctuations, and thus the thermomodule Yule 6
can be operated as described above under its suitable conditions. For example, when the planar body is placed under conditions where the temperature rises as in the example described above, the other surface of the thermomodule 6 is kept at a constant temperature, so that the heat absorption effect on one surface of the thermomodule 6 is maintained. can be accomplished with great efficiency.

In the illustrated example, together with the planar body edge positioning mechanism 13, the test electrode 2 can be moved forward and backward in the direction of the arrow.
0 and 21 are provided, and with these, as mentioned above, it is possible to investigate the electrical characteristics of planar bodies of various sizes in a constant temperature state, for example, to determine the current-voltage characteristics of a solar cell. can. When examining the electrical characteristics in the thickness direction of the planar body in this way, it is also possible to use the holding plate 2 as the other electrode. Of course, it is also possible to provide other inspection mechanisms to examine other characteristics of the planar body under constant temperature conditions.

The current supply mechanism in the present invention is preferably of the proportional control type as described above, but it is preferable that the power supply mechanism supplies a constant value of current and the current supplied from this to the thermomodule 6 is maintained. The plate 2 may be configured with a control mechanism that controls on/off by comparing the signal from the temperature detector with the signal from the temperature setting mechanism.

Of course, the same effect can be obtained by flowing another cooling fluid instead of flowing water through the water passage.

As described above, the planar object constant temperature device of the present invention has an extremely simple configuration, and can control the target planar object.
Even if the area is large, it is possible to provide a planar body constant temperature device that can maintain the entire area at a desired constant temperature stably and with high precision.

[Brief explanation of drawings]

FIG. 1 and FIG. 2 are a plan view and a vertical sectional view of essential parts, respectively, showing an embodiment of the sheet body constant temperature device of the present invention;
FIG. 3 is a circuit diagram of an example of a current supply mechanism that can be used in the present invention, and FIG. 4 is a sectional view showing an example of the arrangement of temperature detectors on a holding plate. 2... Holding plate, 3... Hole for chuck, 4... Exhaust path member, 6... Thermo module, 7... Water passage, 8... Differential amplifier, 9... Resistance thermometer, 10
... Reference voltage source for temperature setting, 11 ... Amplifier, 1
2... Planar body side edge positioning mechanism, 13... Planar body edge positioning mechanism, 14... Abutment.

Claims (1)

[Claims] 1. A holding plate made of a good thermal conductor, on the surface of which is formed a hole for a chuck through which reduced pressure is applied to hold a planar body that is to be maintained at a constant temperature, and one side of the holding plate is placed in close contact with the back side of this holding plate. A thermomodule is provided, which is a plate-shaped body in which a large number of Peltier effect elements are arranged in the same direction, and is energized to produce a temperature difference on both sides of the thermomodule, and a cooling fluid flow path formed along the other surface of the thermomodule. , a current supply mechanism that includes a temperature detector that detects the temperature of the holding plate, and supplies a controlled current to the thermomodule to maintain the planar body in a constant temperature state based on a signal from the temperature detector; A planar body constant temperature device characterized by comprising: