JPS567294B2 - - Google Patents
Info
- Publication number
- JPS567294B2 JPS567294B2 JP10807677A JP10807677A JPS567294B2 JP S567294 B2 JPS567294 B2 JP S567294B2 JP 10807677 A JP10807677 A JP 10807677A JP 10807677 A JP10807677 A JP 10807677A JP S567294 B2 JPS567294 B2 JP S567294B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10807677A JPS5441078A (en) | 1977-09-08 | 1977-09-08 | Device for inspecting semiconductor |
US05/928,711 US4219110A (en) | 1977-09-08 | 1978-07-27 | Wafer probe apparatus with pneumatic wafer orienting mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10807677A JPS5441078A (en) | 1977-09-08 | 1977-09-08 | Device for inspecting semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5441078A JPS5441078A (en) | 1979-03-31 |
JPS567294B2 true JPS567294B2 (en) | 1981-02-17 |
Family
ID=14475259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10807677A Granted JPS5441078A (en) | 1977-09-08 | 1977-09-08 | Device for inspecting semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5441078A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5626492A (en) * | 1979-08-13 | 1981-03-14 | Matsushita Electric Ind Co Ltd | Device for mouting cylindrical leadless electronic part |
JPS5776461A (en) * | 1980-10-31 | 1982-05-13 | Ushio Inc | Device for maintaining constant temperature of flat body |
JPS5871808U (en) * | 1981-11-10 | 1983-05-16 | 株式会社明電舎 | Wireless guidance device for unmanned vehicles |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49115665A (en) * | 1973-03-07 | 1974-11-05 |
-
1977
- 1977-09-08 JP JP10807677A patent/JPS5441078A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49115665A (en) * | 1973-03-07 | 1974-11-05 |
Also Published As
Publication number | Publication date |
---|---|
JPS5441078A (en) | 1979-03-31 |