JPS567294B2 - - Google Patents

Info

Publication number
JPS567294B2
JPS567294B2 JP10807677A JP10807677A JPS567294B2 JP S567294 B2 JPS567294 B2 JP S567294B2 JP 10807677 A JP10807677 A JP 10807677A JP 10807677 A JP10807677 A JP 10807677A JP S567294 B2 JPS567294 B2 JP S567294B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10807677A
Other languages
Japanese (ja)
Other versions
JPS5441078A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10807677A priority Critical patent/JPS5441078A/en
Priority to US05/928,711 priority patent/US4219110A/en
Publication of JPS5441078A publication Critical patent/JPS5441078A/en
Publication of JPS567294B2 publication Critical patent/JPS567294B2/ja
Granted legal-status Critical Current

Links

JP10807677A 1977-09-08 1977-09-08 Device for inspecting semiconductor Granted JPS5441078A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10807677A JPS5441078A (en) 1977-09-08 1977-09-08 Device for inspecting semiconductor
US05/928,711 US4219110A (en) 1977-09-08 1978-07-27 Wafer probe apparatus with pneumatic wafer orienting mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10807677A JPS5441078A (en) 1977-09-08 1977-09-08 Device for inspecting semiconductor

Publications (2)

Publication Number Publication Date
JPS5441078A JPS5441078A (en) 1979-03-31
JPS567294B2 true JPS567294B2 (en) 1981-02-17

Family

ID=14475259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10807677A Granted JPS5441078A (en) 1977-09-08 1977-09-08 Device for inspecting semiconductor

Country Status (1)

Country Link
JP (1) JPS5441078A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626492A (en) * 1979-08-13 1981-03-14 Matsushita Electric Ind Co Ltd Device for mouting cylindrical leadless electronic part
JPS5776461A (en) * 1980-10-31 1982-05-13 Ushio Inc Device for maintaining constant temperature of flat body
JPS5871808U (en) * 1981-11-10 1983-05-16 株式会社明電舎 Wireless guidance device for unmanned vehicles

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (en) * 1973-03-07 1974-11-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (en) * 1973-03-07 1974-11-05

Also Published As

Publication number Publication date
JPS5441078A (en) 1979-03-31

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