JPS5439855A - Method of making thin film capacitor - Google Patents

Method of making thin film capacitor

Info

Publication number
JPS5439855A
JPS5439855A JP10581077A JP10581077A JPS5439855A JP S5439855 A JPS5439855 A JP S5439855A JP 10581077 A JP10581077 A JP 10581077A JP 10581077 A JP10581077 A JP 10581077A JP S5439855 A JPS5439855 A JP S5439855A
Authority
JP
Japan
Prior art keywords
thin film
film capacitor
making thin
making
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10581077A
Other languages
Japanese (ja)
Inventor
Takao Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10581077A priority Critical patent/JPS5439855A/en
Publication of JPS5439855A publication Critical patent/JPS5439855A/en
Pending legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP10581077A 1977-09-05 1977-09-05 Method of making thin film capacitor Pending JPS5439855A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10581077A JPS5439855A (en) 1977-09-05 1977-09-05 Method of making thin film capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10581077A JPS5439855A (en) 1977-09-05 1977-09-05 Method of making thin film capacitor

Publications (1)

Publication Number Publication Date
JPS5439855A true JPS5439855A (en) 1979-03-27

Family

ID=14417447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10581077A Pending JPS5439855A (en) 1977-09-05 1977-09-05 Method of making thin film capacitor

Country Status (1)

Country Link
JP (1) JPS5439855A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6442849A (en) * 1987-08-10 1989-02-15 Nec Corp Capacitor built-in type semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6442849A (en) * 1987-08-10 1989-02-15 Nec Corp Capacitor built-in type semiconductor device
JPH0581188B2 (en) * 1987-08-10 1993-11-11 Nippon Electric Co

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