JPS53109157A - Method of making thin film capacitor - Google Patents

Method of making thin film capacitor

Info

Publication number
JPS53109157A
JPS53109157A JP2364677A JP2364677A JPS53109157A JP S53109157 A JPS53109157 A JP S53109157A JP 2364677 A JP2364677 A JP 2364677A JP 2364677 A JP2364677 A JP 2364677A JP S53109157 A JPS53109157 A JP S53109157A
Authority
JP
Japan
Prior art keywords
thin film
film capacitor
making thin
making
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2364677A
Other languages
Japanese (ja)
Other versions
JPS5942966B2 (en
Inventor
Takashige Oda
Hajime Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP2364677A priority Critical patent/JPS5942966B2/en
Publication of JPS53109157A publication Critical patent/JPS53109157A/en
Publication of JPS5942966B2 publication Critical patent/JPS5942966B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP2364677A 1977-03-04 1977-03-04 Method of manufacturing thin film capacitors Expired JPS5942966B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2364677A JPS5942966B2 (en) 1977-03-04 1977-03-04 Method of manufacturing thin film capacitors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2364677A JPS5942966B2 (en) 1977-03-04 1977-03-04 Method of manufacturing thin film capacitors

Publications (2)

Publication Number Publication Date
JPS53109157A true JPS53109157A (en) 1978-09-22
JPS5942966B2 JPS5942966B2 (en) 1984-10-18

Family

ID=12116310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2364677A Expired JPS5942966B2 (en) 1977-03-04 1977-03-04 Method of manufacturing thin film capacitors

Country Status (1)

Country Link
JP (1) JPS5942966B2 (en)

Also Published As

Publication number Publication date
JPS5942966B2 (en) 1984-10-18

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