JPS53135449A - Method of making thin film capacitor - Google Patents

Method of making thin film capacitor

Info

Publication number
JPS53135449A
JPS53135449A JP5035877A JP5035877A JPS53135449A JP S53135449 A JPS53135449 A JP S53135449A JP 5035877 A JP5035877 A JP 5035877A JP 5035877 A JP5035877 A JP 5035877A JP S53135449 A JPS53135449 A JP S53135449A
Authority
JP
Japan
Prior art keywords
thin film
film capacitor
making thin
making
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5035877A
Other languages
Japanese (ja)
Inventor
Katsuaki Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP5035877A priority Critical patent/JPS53135449A/en
Publication of JPS53135449A publication Critical patent/JPS53135449A/en
Pending legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP5035877A 1977-04-28 1977-04-28 Method of making thin film capacitor Pending JPS53135449A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5035877A JPS53135449A (en) 1977-04-28 1977-04-28 Method of making thin film capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5035877A JPS53135449A (en) 1977-04-28 1977-04-28 Method of making thin film capacitor

Publications (1)

Publication Number Publication Date
JPS53135449A true JPS53135449A (en) 1978-11-27

Family

ID=12856661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5035877A Pending JPS53135449A (en) 1977-04-28 1977-04-28 Method of making thin film capacitor

Country Status (1)

Country Link
JP (1) JPS53135449A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180014A (en) * 1982-04-16 1983-10-21 富士通株式会社 Thin film forming method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180014A (en) * 1982-04-16 1983-10-21 富士通株式会社 Thin film forming method
JPH0470762B2 (en) * 1982-04-16 1992-11-11 Fujitsu Ltd

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