JPS53123862A - Method of making thin film capacitor - Google Patents

Method of making thin film capacitor

Info

Publication number
JPS53123862A
JPS53123862A JP3887577A JP3887577A JPS53123862A JP S53123862 A JPS53123862 A JP S53123862A JP 3887577 A JP3887577 A JP 3887577A JP 3887577 A JP3887577 A JP 3887577A JP S53123862 A JPS53123862 A JP S53123862A
Authority
JP
Japan
Prior art keywords
thin film
film capacitor
making thin
making
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3887577A
Other languages
Japanese (ja)
Inventor
Hideo Miyauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3887577A priority Critical patent/JPS53123862A/en
Publication of JPS53123862A publication Critical patent/JPS53123862A/en
Pending legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP3887577A 1977-04-04 1977-04-04 Method of making thin film capacitor Pending JPS53123862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3887577A JPS53123862A (en) 1977-04-04 1977-04-04 Method of making thin film capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3887577A JPS53123862A (en) 1977-04-04 1977-04-04 Method of making thin film capacitor

Publications (1)

Publication Number Publication Date
JPS53123862A true JPS53123862A (en) 1978-10-28

Family

ID=12537380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3887577A Pending JPS53123862A (en) 1977-04-04 1977-04-04 Method of making thin film capacitor

Country Status (1)

Country Link
JP (1) JPS53123862A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180014A (en) * 1982-04-16 1983-10-21 富士通株式会社 Thin film forming method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58180014A (en) * 1982-04-16 1983-10-21 富士通株式会社 Thin film forming method
JPH0470762B2 (en) * 1982-04-16 1992-11-11 Fujitsu Ltd

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