Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
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Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co LtdfiledCriticalToshiba Corp
Priority to JP9921477ApriorityCriticalpatent/JPS5433062A/en
Publication of JPS5433062ApublicationCriticalpatent/JPS5433062A/en
A Measuring Device Byusing Mechanical Method
(AREA)
Abstract
PURPOSE: To measure the dimensions between the circumference and patterns of circuit substrates readily with high accuracy by locating the reference line within the field of view of microscopes to the center of the registration marks (RM) of prototype and observing the RMs of the measuring object.
COPYRIGHT: (C)1979,JPO&Japio
JP9921477A1977-08-191977-08-19Method and apparatus for measuring plane dimensions
PendingJPS5433062A
(en)