JPS5429968A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5429968A JPS5429968A JP9516777A JP9516777A JPS5429968A JP S5429968 A JPS5429968 A JP S5429968A JP 9516777 A JP9516777 A JP 9516777A JP 9516777 A JP9516777 A JP 9516777A JP S5429968 A JPS5429968 A JP S5429968A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- substrate
- irradiating
- shorten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thyristors (AREA)
- Bipolar Transistors (AREA)
- Recrystallisation Techniques (AREA)
Abstract
PURPOSE: To shorten a switching time by irradiating a semiconductor substrate with a formed PN junction, while being maintained at a fixed temperature, with electron beams which have enough energy and beam-flux density to generate a grid defect inside the substrate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9516777A JPS5429968A (en) | 1977-08-10 | 1977-08-10 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9516777A JPS5429968A (en) | 1977-08-10 | 1977-08-10 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5429968A true JPS5429968A (en) | 1979-03-06 |
Family
ID=14130199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9516777A Pending JPS5429968A (en) | 1977-08-10 | 1977-08-10 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5429968A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62167845A (en) * | 1986-01-20 | 1987-07-24 | Kanai Hiroyuki | Manufacture of sintered ring material for spinning machine |
-
1977
- 1977-08-10 JP JP9516777A patent/JPS5429968A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62167845A (en) * | 1986-01-20 | 1987-07-24 | Kanai Hiroyuki | Manufacture of sintered ring material for spinning machine |
JPH0434623B2 (en) * | 1986-01-20 | 1992-06-08 | Kanai Hiroyuki |
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