JPS5429968A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5429968A
JPS5429968A JP9516777A JP9516777A JPS5429968A JP S5429968 A JPS5429968 A JP S5429968A JP 9516777 A JP9516777 A JP 9516777A JP 9516777 A JP9516777 A JP 9516777A JP S5429968 A JPS5429968 A JP S5429968A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
substrate
irradiating
shorten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9516777A
Other languages
Japanese (ja)
Inventor
Toshikatsu Shirasawa
Mitsuru Hirao
Nobutake Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9516777A priority Critical patent/JPS5429968A/en
Publication of JPS5429968A publication Critical patent/JPS5429968A/en
Pending legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
  • Bipolar Transistors (AREA)
  • Recrystallisation Techniques (AREA)

Abstract

PURPOSE: To shorten a switching time by irradiating a semiconductor substrate with a formed PN junction, while being maintained at a fixed temperature, with electron beams which have enough energy and beam-flux density to generate a grid defect inside the substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP9516777A 1977-08-10 1977-08-10 Manufacture of semiconductor device Pending JPS5429968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9516777A JPS5429968A (en) 1977-08-10 1977-08-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9516777A JPS5429968A (en) 1977-08-10 1977-08-10 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5429968A true JPS5429968A (en) 1979-03-06

Family

ID=14130199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9516777A Pending JPS5429968A (en) 1977-08-10 1977-08-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5429968A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62167845A (en) * 1986-01-20 1987-07-24 Kanai Hiroyuki Manufacture of sintered ring material for spinning machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62167845A (en) * 1986-01-20 1987-07-24 Kanai Hiroyuki Manufacture of sintered ring material for spinning machine
JPH0434623B2 (en) * 1986-01-20 1992-06-08 Kanai Hiroyuki

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