JPS5428281A - Vacuum treating apparatus - Google Patents

Vacuum treating apparatus

Info

Publication number
JPS5428281A
JPS5428281A JP9379877A JP9379877A JPS5428281A JP S5428281 A JPS5428281 A JP S5428281A JP 9379877 A JP9379877 A JP 9379877A JP 9379877 A JP9379877 A JP 9379877A JP S5428281 A JPS5428281 A JP S5428281A
Authority
JP
Japan
Prior art keywords
treating apparatus
vacuum treating
dome
hanged
hanger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9379877A
Other languages
Japanese (ja)
Inventor
Keijiro Nishida
Mitsuo Kakehi
Osamu Kamiya
Nobuyuki Sekimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP9379877A priority Critical patent/JPS5428281A/en
Priority to US05/928,435 priority patent/US4226208A/en
Priority to DE2834353A priority patent/DE2834353C2/en
Publication of JPS5428281A publication Critical patent/JPS5428281A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To increase productivity and to produce constant and high quality work, by use of an apparatus so constituted as to effect cooling, deposition by evaporation, or heating of material to be worked, which is placed on the dome fastened and hanged in a hanger, and taking in and out of the dome in parallel.
JP9379877A 1977-08-04 1977-08-04 Vacuum treating apparatus Pending JPS5428281A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP9379877A JPS5428281A (en) 1977-08-04 1977-08-04 Vacuum treating apparatus
US05/928,435 US4226208A (en) 1977-08-04 1978-07-27 Vapor deposition apparatus
DE2834353A DE2834353C2 (en) 1977-08-04 1978-08-04 Vacuum evaporation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9379877A JPS5428281A (en) 1977-08-04 1977-08-04 Vacuum treating apparatus

Publications (1)

Publication Number Publication Date
JPS5428281A true JPS5428281A (en) 1979-03-02

Family

ID=14092426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9379877A Pending JPS5428281A (en) 1977-08-04 1977-08-04 Vacuum treating apparatus

Country Status (1)

Country Link
JP (1) JPS5428281A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598896A (en) * 1982-07-07 1984-01-18 株式会社クボタ Drilling control in earth auger machine
JPH0351421A (en) * 1989-07-19 1991-03-05 Giken Seisakusho Co Ltd Pile press-in/drawing machine equipped with earth auger driving mechanism

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51115290A (en) * 1975-03-10 1976-10-09 Signetics Corp Vacuum spattering process and the apparatus thereof
JPS51116686A (en) * 1975-04-07 1976-10-14 Hitachi Ltd Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51115290A (en) * 1975-03-10 1976-10-09 Signetics Corp Vacuum spattering process and the apparatus thereof
JPS51116686A (en) * 1975-04-07 1976-10-14 Hitachi Ltd Semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598896A (en) * 1982-07-07 1984-01-18 株式会社クボタ Drilling control in earth auger machine
JPH0224993B2 (en) * 1982-07-07 1990-05-31 Kubota Tetsuko Kk
JPH0351421A (en) * 1989-07-19 1991-03-05 Giken Seisakusho Co Ltd Pile press-in/drawing machine equipped with earth auger driving mechanism

Similar Documents

Publication Publication Date Title
BE597127A (en) Process for obtaining diamonds.
JPS5428281A (en) Vacuum treating apparatus
BE584957Q (en) Acetylene production process.
JPS5233253A (en) Grip apparatus
JPS52136573A (en) Cvd apparatus
JPS5391663A (en) Plasma cvd device
JPS5214295A (en) Grinding finishing apparatus
FR1169059A (en) Process for preparing octahalogenomethylene tetrahydrophthalanes fluorinated in alpha and alpha, alpha '
FR1245974A (en) Process for treating porous carbon articles
JPS5238484A (en) Method of ionplating
JPS5260279A (en) Substrate cooling apparatus in vacuum evaporation machine, etc.
FR1508051A (en) Process for obtaining laminates and profiles from textile waste
JPS53142334A (en) Glow discharge surface treating apparatus
BE587832A (en) Process for the production of carbon electrodes.
CS169762B2 (en) Method of leather production with nubuck surface by means of face's thermal treatment
JPS51113281A (en) Sizing feed device
JPS51133114A (en) A method and apparatus for cooling of strips
FR1163458A (en) Improved process for preparing 1,1-diaryl-2-aminoalkanols
JPS5429813A (en) Hardening process
CA530544A (en) Apparatus for the heat treatment of fabrics
JPS52153666A (en) Plasma treatment apparatus
JPS51140198A (en) Crystal working process
GB802010A (en) Improvements in or relating to the treatment of steel
CA526369A (en) Work treating apparatus with tilting work-supporting rail
JPS51128680A (en) An ion-applied heat treatment furnace

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees