JPS542060A - Semiconductor wafer - Google Patents

Semiconductor wafer

Info

Publication number
JPS542060A
JPS542060A JP6750377A JP6750377A JPS542060A JP S542060 A JPS542060 A JP S542060A JP 6750377 A JP6750377 A JP 6750377A JP 6750377 A JP6750377 A JP 6750377A JP S542060 A JPS542060 A JP S542060A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
symbols
automatic
descriving
rprocess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6750377A
Other languages
English (en)
Inventor
Masakazu Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6750377A priority Critical patent/JPS542060A/ja
Priority to GB23975/78A priority patent/GB1584343A/en
Priority to DE2823869A priority patent/DE2823869C2/de
Priority to US05/911,234 priority patent/US4166574A/en
Publication of JPS542060A publication Critical patent/JPS542060A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6750377A 1977-06-07 1977-06-07 Semiconductor wafer Pending JPS542060A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP6750377A JPS542060A (en) 1977-06-07 1977-06-07 Semiconductor wafer
GB23975/78A GB1584343A (en) 1977-06-07 1978-05-30 Apparatus for marking identification symbols on wafer
DE2823869A DE2823869C2 (de) 1977-06-07 1978-05-31 Kennsymbol-Anreißvorrichtung
US05/911,234 US4166574A (en) 1977-06-07 1978-05-31 Apparatus for marking identification symbols on wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6750377A JPS542060A (en) 1977-06-07 1977-06-07 Semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS542060A true JPS542060A (en) 1979-01-09

Family

ID=13346847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6750377A Pending JPS542060A (en) 1977-06-07 1977-06-07 Semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS542060A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690269A (en) * 1979-12-25 1981-07-22 Toshiba Corp Measuring method for semiconductor integrated circuit
JPS5742125A (en) * 1980-08-27 1982-03-09 Hitachi Ltd Aligner
JPS58169924A (ja) * 1982-03-30 1983-10-06 Fujitsu Ltd Ｉｃウエハの試験装置
JPS58198816A (ja) * 1982-05-14 1983-11-18 Nec Corp 含浸型陰極
JPS6255847A (ja) * 1985-09-04 1987-03-11 Hitachi Ltd マグネトロン用陰極
JPH01266735A (ja) * 1988-04-18 1989-10-24 Matsushita Electron Corp 半導体基板

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690269A (en) * 1979-12-25 1981-07-22 Toshiba Corp Measuring method for semiconductor integrated circuit
JPS6228567B2 (ja) * 1979-12-25 1987-06-22 Tokyo Shibaura Electric Co
JPS5742125A (en) * 1980-08-27 1982-03-09 Hitachi Ltd Aligner
JPS58169924A (ja) * 1982-03-30 1983-10-06 Fujitsu Ltd Ｉｃウエハの試験装置
JPS58198816A (ja) * 1982-05-14 1983-11-18 Nec Corp 含浸型陰極
JPS6255847A (ja) * 1985-09-04 1987-03-11 Hitachi Ltd マグネトロン用陰極
JPH01266735A (ja) * 1988-04-18 1989-10-24 Matsushita Electron Corp 半導体基板

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