JPS5416236B1 - - Google Patents
Info
- Publication number
- JPS5416236B1 JPS5416236B1 JP8172771A JP8172771A JPS5416236B1 JP S5416236 B1 JPS5416236 B1 JP S5416236B1 JP 8172771 A JP8172771 A JP 8172771A JP 8172771 A JP8172771 A JP 8172771A JP S5416236 B1 JPS5416236 B1 JP S5416236B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/282—Static spectrometers using electrostatic analysers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/201—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US8195270A | 1970-10-19 | 1970-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5416236B1 true JPS5416236B1 (de) | 1979-06-20 |
Family
ID=22167448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8172771A Pending JPS5416236B1 (de) | 1970-10-19 | 1971-10-18 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3665185A (de) |
| JP (1) | JPS5416236B1 (de) |
| CA (1) | CA943670A (de) |
| CH (1) | CH542440A (de) |
| DE (1) | DE2152467C3 (de) |
| FR (1) | FR2111481A5 (de) |
| GB (1) | GB1365369A (de) |
| NL (1) | NL7114200A (de) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3920989A (en) * | 1974-09-20 | 1975-11-18 | Minnesota Mining & Mfg | Ion scattering spectrometer utilizing charge exchange processes |
| US4249077A (en) * | 1978-08-04 | 1981-02-03 | Crawford Charles K | Ion charge neutralization for electron beam devices |
| DE2950330C2 (de) * | 1979-12-14 | 1983-06-01 | Leybold-Heraeus GmbH, 5000 Köln | Vorrichtung zur chemischen Analyse von Proben |
| US4361762A (en) * | 1980-07-30 | 1982-11-30 | Rca Corporation | Apparatus and method for neutralizing the beam in an ion implanter |
| DE3128814A1 (de) * | 1981-07-21 | 1983-02-10 | Siemens AG, 1000 Berlin und 8000 München | Elektrisch leitende probenhalterung fuer die analysentechnik der sekundaerionen-massenspektrometrie |
| FR2542089B1 (fr) * | 1983-01-14 | 1985-11-08 | Cameca | Procede et dispositif pour l'analyse ionique d'un echantillon isolant |
| JPS60135846A (ja) * | 1983-12-26 | 1985-07-19 | Anelva Corp | 二次イオン質量分析方法 |
| US4564758A (en) * | 1984-02-01 | 1986-01-14 | Cameca | Process and device for the ionic analysis of an insulating sample |
| US4680467A (en) * | 1986-04-08 | 1987-07-14 | Kevex Corporation | Electron spectroscopy system for chemical analysis of electrically isolated specimens |
| GB8703012D0 (en) * | 1987-02-10 | 1987-03-18 | Vg Instr Group | Secondary ion mass spectrometer |
| JPH01220350A (ja) * | 1988-02-26 | 1989-09-04 | Hitachi Ltd | 帯電抑制方法及びその装置を用いた粒子線照射装置 |
| GB9122161D0 (en) * | 1991-10-18 | 1991-11-27 | Kratos Analytical Ltd | Charged particle energy analysers |
| US7320733B2 (en) * | 2003-05-09 | 2008-01-22 | Sukegawa Electric Co., Ltd. | Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof |
| DE102004014582B4 (de) * | 2004-03-25 | 2009-08-20 | Bruker Daltonik Gmbh | Ionenoptische Phasenvolumenkomprimierung |
| DE102014118797A1 (de) * | 2014-12-17 | 2016-06-23 | Vorwerk & Co. Interholding Gesellschaft mit beschränkter Haftung | Behälter mit einer Akkumulator betriebenen Heißklebepistole sowie Heißklebepistole mit Vorwärmfunktion |
| CN111383903A (zh) * | 2015-11-17 | 2020-07-07 | Atonarp株式会社 | 分析装置及其控制方法 |
| CN108493091B (zh) * | 2018-03-09 | 2020-03-24 | 中国计量科学研究院 | 一种高电子利用率低能电离装置、质谱系统及方法 |
| CN114047215B (zh) * | 2021-10-20 | 2023-08-15 | 北京科技大学顺德研究生院 | 一种用于消除被测样品表面不均匀荷电的装置及方法 |
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1970
- 1970-10-19 US US81952A patent/US3665185A/en not_active Expired - Lifetime
-
1971
- 1971-10-15 NL NL7114200A patent/NL7114200A/xx not_active Application Discontinuation
- 1971-10-18 CA CA125,412A patent/CA943670A/en not_active Expired
- 1971-10-18 CH CH1520271A patent/CH542440A/de not_active IP Right Cessation
- 1971-10-18 DE DE2152467A patent/DE2152467C3/de not_active Expired
- 1971-10-18 JP JP8172771A patent/JPS5416236B1/ja active Pending
- 1971-10-18 GB GB4843471A patent/GB1365369A/en not_active Expired
- 1971-10-18 FR FR7137286A patent/FR2111481A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2111481A5 (de) | 1972-06-02 |
| NL7114200A (de) | 1972-04-21 |
| DE2152467C3 (de) | 1981-01-08 |
| DE2152467A1 (de) | 1972-04-20 |
| GB1365369A (en) | 1974-09-04 |
| DE2152467B2 (de) | 1980-04-17 |
| US3665185A (en) | 1972-05-23 |
| CA943670A (en) | 1974-03-12 |
| CH542440A (de) | 1973-09-30 |