JPS54154979A - Manufacture of insulated gate type semiconductor device - Google Patents

Manufacture of insulated gate type semiconductor device

Info

Publication number
JPS54154979A
JPS54154979A JP6455778A JP6455778A JPS54154979A JP S54154979 A JPS54154979 A JP S54154979A JP 6455778 A JP6455778 A JP 6455778A JP 6455778 A JP6455778 A JP 6455778A JP S54154979 A JPS54154979 A JP S54154979A
Authority
JP
Japan
Prior art keywords
film
regions
substrate
region
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6455778A
Other languages
English (en)
Japanese (ja)
Other versions
JPS626664B2 (enrdf_load_stackoverflow
Inventor
Takeshi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6455778A priority Critical patent/JPS54154979A/ja
Publication of JPS54154979A publication Critical patent/JPS54154979A/ja
Publication of JPS626664B2 publication Critical patent/JPS626664B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
JP6455778A 1978-05-29 1978-05-29 Manufacture of insulated gate type semiconductor device Granted JPS54154979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6455778A JPS54154979A (en) 1978-05-29 1978-05-29 Manufacture of insulated gate type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6455778A JPS54154979A (en) 1978-05-29 1978-05-29 Manufacture of insulated gate type semiconductor device

Publications (2)

Publication Number Publication Date
JPS54154979A true JPS54154979A (en) 1979-12-06
JPS626664B2 JPS626664B2 (enrdf_load_stackoverflow) 1987-02-12

Family

ID=13261642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6455778A Granted JPS54154979A (en) 1978-05-29 1978-05-29 Manufacture of insulated gate type semiconductor device

Country Status (1)

Country Link
JP (1) JPS54154979A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4503451A (en) * 1982-07-30 1985-03-05 Motorola, Inc. Low resistance buried power bus for integrated circuits
JPS62291047A (ja) * 1986-06-10 1987-12-17 Matsushita Electronics Corp 半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51151081A (en) * 1975-06-20 1976-12-25 Matsushita Electric Ind Co Ltd Mos type semiconductor apparatus and that manufacturing method
JPS5310281A (en) * 1976-07-15 1978-01-30 Matsushita Electric Ind Co Ltd Production of mos type semiconductor integrated circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51151081A (en) * 1975-06-20 1976-12-25 Matsushita Electric Ind Co Ltd Mos type semiconductor apparatus and that manufacturing method
JPS5310281A (en) * 1976-07-15 1978-01-30 Matsushita Electric Ind Co Ltd Production of mos type semiconductor integrated circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4503451A (en) * 1982-07-30 1985-03-05 Motorola, Inc. Low resistance buried power bus for integrated circuits
JPS62291047A (ja) * 1986-06-10 1987-12-17 Matsushita Electronics Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS626664B2 (enrdf_load_stackoverflow) 1987-02-12

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