JPS54150079A - Method of forming pattern - Google Patents

Method of forming pattern

Info

Publication number
JPS54150079A
JPS54150079A JP5907078A JP5907078A JPS54150079A JP S54150079 A JPS54150079 A JP S54150079A JP 5907078 A JP5907078 A JP 5907078A JP 5907078 A JP5907078 A JP 5907078A JP S54150079 A JPS54150079 A JP S54150079A
Authority
JP
Japan
Prior art keywords
forming pattern
pattern
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5907078A
Other languages
Japanese (ja)
Inventor
Akira Miura
Akizou Hideyama
Iwao Toukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP5907078A priority Critical patent/JPS54150079A/en
Publication of JPS54150079A publication Critical patent/JPS54150079A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP5907078A 1978-05-18 1978-05-18 Method of forming pattern Pending JPS54150079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5907078A JPS54150079A (en) 1978-05-18 1978-05-18 Method of forming pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5907078A JPS54150079A (en) 1978-05-18 1978-05-18 Method of forming pattern

Publications (1)

Publication Number Publication Date
JPS54150079A true JPS54150079A (en) 1979-11-24

Family

ID=13102714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5907078A Pending JPS54150079A (en) 1978-05-18 1978-05-18 Method of forming pattern

Country Status (1)

Country Link
JP (1) JPS54150079A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132619A (en) * 1983-01-19 1984-07-30 Toshiba Corp Method and apparatus for forming resist pattern
JPS59132618A (en) * 1983-01-19 1984-07-30 Toshiba Corp Method and apparatus for forming resist pattern
JPS59132127A (en) * 1983-01-19 1984-07-30 Toshiba Corp Method and apparatus for forming resist pattern
JPS59155932A (en) * 1983-02-25 1984-09-05 Mitsubishi Electric Corp Forming method of minute pattern
JPS6286726A (en) * 1985-10-11 1987-04-21 Mitsubishi Electric Corp Formation of resist pattern
JPH01270227A (en) * 1988-04-20 1989-10-27 Fujitsu Ltd Resist film forming method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132619A (en) * 1983-01-19 1984-07-30 Toshiba Corp Method and apparatus for forming resist pattern
JPS59132618A (en) * 1983-01-19 1984-07-30 Toshiba Corp Method and apparatus for forming resist pattern
JPS59132127A (en) * 1983-01-19 1984-07-30 Toshiba Corp Method and apparatus for forming resist pattern
JPH0480531B2 (en) * 1983-01-19 1992-12-18 Tokyo Shibaura Electric Co
JPS59155932A (en) * 1983-02-25 1984-09-05 Mitsubishi Electric Corp Forming method of minute pattern
JPS6286726A (en) * 1985-10-11 1987-04-21 Mitsubishi Electric Corp Formation of resist pattern
JPH01270227A (en) * 1988-04-20 1989-10-27 Fujitsu Ltd Resist film forming method

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