JPS54163680A - Pattern forming method - Google Patents

Pattern forming method

Info

Publication number
JPS54163680A
JPS54163680A JP7265578A JP7265578A JPS54163680A JP S54163680 A JPS54163680 A JP S54163680A JP 7265578 A JP7265578 A JP 7265578A JP 7265578 A JP7265578 A JP 7265578A JP S54163680 A JPS54163680 A JP S54163680A
Authority
JP
Japan
Prior art keywords
forming method
pattern forming
pattern
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7265578A
Other languages
Japanese (ja)
Inventor
Shiyuuzou Ooshio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7265578A priority Critical patent/JPS54163680A/en
Publication of JPS54163680A publication Critical patent/JPS54163680A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP7265578A 1978-06-15 1978-06-15 Pattern forming method Pending JPS54163680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7265578A JPS54163680A (en) 1978-06-15 1978-06-15 Pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7265578A JPS54163680A (en) 1978-06-15 1978-06-15 Pattern forming method

Publications (1)

Publication Number Publication Date
JPS54163680A true JPS54163680A (en) 1979-12-26

Family

ID=13495603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7265578A Pending JPS54163680A (en) 1978-06-15 1978-06-15 Pattern forming method

Country Status (1)

Country Link
JP (1) JPS54163680A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111221A (en) * 1980-01-25 1981-09-02 Chiyou Lsi Gijutsu Kenkyu Kumiai Formation on mask for etching
JPS57106029A (en) * 1980-12-23 1982-07-01 Nippon Telegr & Teleph Corp <Ntt> Formation of high-heat-resistant, negative type resist pattern
JPS57183028A (en) * 1981-05-07 1982-11-11 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5918634A (en) * 1982-07-21 1984-01-31 Nec Kyushu Ltd Manufacturing device of semiconductor device
JPS6034020A (en) * 1983-08-04 1985-02-21 Fujitsu Ltd Manufacture of semiconductor device
JPS6041227A (en) * 1983-08-15 1985-03-04 Hitachi Ltd Deformation preventive method of photo resist pattern
JPS60244931A (en) * 1984-05-21 1985-12-04 Matsushita Electric Ind Co Ltd Liquid crystal display device and its production
JPS60244929A (en) * 1984-05-21 1985-12-04 Matsushita Electric Ind Co Ltd Liquid crystal display device and its production

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111221A (en) * 1980-01-25 1981-09-02 Chiyou Lsi Gijutsu Kenkyu Kumiai Formation on mask for etching
JPS57106029A (en) * 1980-12-23 1982-07-01 Nippon Telegr & Teleph Corp <Ntt> Formation of high-heat-resistant, negative type resist pattern
JPS57183028A (en) * 1981-05-07 1982-11-11 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5918634A (en) * 1982-07-21 1984-01-31 Nec Kyushu Ltd Manufacturing device of semiconductor device
JPS6034020A (en) * 1983-08-04 1985-02-21 Fujitsu Ltd Manufacture of semiconductor device
JPS6041227A (en) * 1983-08-15 1985-03-04 Hitachi Ltd Deformation preventive method of photo resist pattern
JPH0466021B2 (en) * 1983-08-15 1992-10-21 Hitachi Ltd
JPS60244931A (en) * 1984-05-21 1985-12-04 Matsushita Electric Ind Co Ltd Liquid crystal display device and its production
JPS60244929A (en) * 1984-05-21 1985-12-04 Matsushita Electric Ind Co Ltd Liquid crystal display device and its production

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