JPS54133881A - Method of forming pattern - Google Patents

Method of forming pattern

Info

Publication number
JPS54133881A
JPS54133881A JP4185878A JP4185878A JPS54133881A JP S54133881 A JPS54133881 A JP S54133881A JP 4185878 A JP4185878 A JP 4185878A JP 4185878 A JP4185878 A JP 4185878A JP S54133881 A JPS54133881 A JP S54133881A
Authority
JP
Japan
Prior art keywords
forming pattern
pattern
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4185878A
Other languages
Japanese (ja)
Inventor
Nobuji Tsuchiya
Shigeharu Horiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP4185878A priority Critical patent/JPS54133881A/en
Publication of JPS54133881A publication Critical patent/JPS54133881A/en
Pending legal-status Critical Current

Links

JP4185878A 1978-04-10 1978-04-10 Method of forming pattern Pending JPS54133881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4185878A JPS54133881A (en) 1978-04-10 1978-04-10 Method of forming pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4185878A JPS54133881A (en) 1978-04-10 1978-04-10 Method of forming pattern

Publications (1)

Publication Number Publication Date
JPS54133881A true JPS54133881A (en) 1979-10-17

Family

ID=12619938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4185878A Pending JPS54133881A (en) 1978-04-10 1978-04-10 Method of forming pattern

Country Status (1)

Country Link
JP (1) JPS54133881A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5314710A (en) * 1991-10-02 1994-05-24 Sony Corporation Insulation layer forming method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5314710A (en) * 1991-10-02 1994-05-24 Sony Corporation Insulation layer forming method

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