JPS54149590A - Method of measuring electric characteristics of semiconductor device during process - Google Patents

Method of measuring electric characteristics of semiconductor device during process

Info

Publication number
JPS54149590A
JPS54149590A JP5581179A JP5581179A JPS54149590A JP S54149590 A JPS54149590 A JP S54149590A JP 5581179 A JP5581179 A JP 5581179A JP 5581179 A JP5581179 A JP 5581179A JP S54149590 A JPS54149590 A JP S54149590A
Authority
JP
Japan
Prior art keywords
semiconductor device
device during
electric characteristics
during process
measuring electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5581179A
Other languages
Japanese (ja)
Other versions
JPS5710572B2 (en
Inventor
Esu Marutaani Jiyagiiru
Bii Kosuikii Baanaado
Esu Sandeyuu Jiyagutaaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arris Technology Inc
Original Assignee
Arris Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arris Technology Inc filed Critical Arris Technology Inc
Publication of JPS54149590A publication Critical patent/JPS54149590A/en
Publication of JPS5710572B2 publication Critical patent/JPS5710572B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Non-Volatile Memory (AREA)
JP5581179A 1978-05-15 1979-05-09 Method of measuring electric characteristics of semiconductor device during process Granted JPS54149590A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US90560078A 1978-05-15 1978-05-15

Publications (2)

Publication Number Publication Date
JPS54149590A true JPS54149590A (en) 1979-11-22
JPS5710572B2 JPS5710572B2 (en) 1982-02-26

Family

ID=25421114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5581179A Granted JPS54149590A (en) 1978-05-15 1979-05-09 Method of measuring electric characteristics of semiconductor device during process

Country Status (2)

Country Link
JP (1) JPS54149590A (en)
GB (1) GB2020827B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992584A (en) * 1982-11-18 1984-05-28 Agency Of Ind Science & Technol Probe for testing superconductive thin film functional integrated circuit element
WO2006016448A1 (en) * 2004-08-13 2006-02-16 Shin-Etsu Handotai Co., Ltd. Apparatus for evaluating semiconductor wafer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5066178A (en) * 1973-10-12 1975-06-04
JPS50118681A (en) * 1974-03-01 1975-09-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5066178A (en) * 1973-10-12 1975-06-04
JPS50118681A (en) * 1974-03-01 1975-09-17

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992584A (en) * 1982-11-18 1984-05-28 Agency Of Ind Science & Technol Probe for testing superconductive thin film functional integrated circuit element
JPS6347333B2 (en) * 1982-11-18 1988-09-21 Kogyo Gijutsuin
WO2006016448A1 (en) * 2004-08-13 2006-02-16 Shin-Etsu Handotai Co., Ltd. Apparatus for evaluating semiconductor wafer
JP2006054375A (en) * 2004-08-13 2006-02-23 Shin Etsu Handotai Co Ltd Evaluation apparatus of semiconductor wafer
US7525327B2 (en) 2004-08-13 2009-04-28 Shin-Etsu Handotai Co., Ltd. Apparatus for evaluating semiconductor wafer

Also Published As

Publication number Publication date
GB2020827B (en) 1982-10-20
JPS5710572B2 (en) 1982-02-26
GB2020827A (en) 1979-11-21

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