GB2020827B - Measurement of electrical characteristics of in-process semiconductor devices - Google Patents

Measurement of electrical characteristics of in-process semiconductor devices

Info

Publication number
GB2020827B
GB2020827B GB7912708A GB7912708A GB2020827B GB 2020827 B GB2020827 B GB 2020827B GB 7912708 A GB7912708 A GB 7912708A GB 7912708 A GB7912708 A GB 7912708A GB 2020827 B GB2020827 B GB 2020827B
Authority
GB
United Kingdom
Prior art keywords
measurement
semiconductor devices
electrical characteristics
process semiconductor
electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7912708A
Other versions
GB2020827A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arris Technology Inc
Original Assignee
Arris Technology Inc
General Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arris Technology Inc, General Instrument Corp filed Critical Arris Technology Inc
Publication of GB2020827A publication Critical patent/GB2020827A/en
Application granted granted Critical
Publication of GB2020827B publication Critical patent/GB2020827B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Non-Volatile Memory (AREA)
GB7912708A 1978-05-15 1979-04-11 Measurement of electrical characteristics of in-process semiconductor devices Expired GB2020827B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US90560078A 1978-05-15 1978-05-15

Publications (2)

Publication Number Publication Date
GB2020827A GB2020827A (en) 1979-11-21
GB2020827B true GB2020827B (en) 1982-10-20

Family

ID=25421114

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7912708A Expired GB2020827B (en) 1978-05-15 1979-04-11 Measurement of electrical characteristics of in-process semiconductor devices

Country Status (2)

Country Link
JP (1) JPS54149590A (en)
GB (1) GB2020827B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992584A (en) * 1982-11-18 1984-05-28 Agency Of Ind Science & Technol Probe for testing superconductive thin film functional integrated circuit element
JP2006054375A (en) * 2004-08-13 2006-02-23 Shin Etsu Handotai Co Ltd Evaluation apparatus of semiconductor wafer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5066178A (en) * 1973-10-12 1975-06-04
JPS5223225B2 (en) * 1974-03-01 1977-06-22

Also Published As

Publication number Publication date
JPS5710572B2 (en) 1982-02-26
JPS54149590A (en) 1979-11-22
GB2020827A (en) 1979-11-21

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 19990410