JPS5066178A - - Google Patents
Info
- Publication number
- JPS5066178A JPS5066178A JP11388373A JP11388373A JPS5066178A JP S5066178 A JPS5066178 A JP S5066178A JP 11388373 A JP11388373 A JP 11388373A JP 11388373 A JP11388373 A JP 11388373A JP S5066178 A JPS5066178 A JP S5066178A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11388373A JPS5066178A (en) | 1973-10-12 | 1973-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11388373A JPS5066178A (en) | 1973-10-12 | 1973-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5066178A true JPS5066178A (en) | 1975-06-04 |
Family
ID=14623499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11388373A Pending JPS5066178A (en) | 1973-10-12 | 1973-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5066178A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54149590A (en) * | 1978-05-15 | 1979-11-22 | Gen Instrument Corp | Method of measuring electric characteristics of semiconductor device during process |
-
1973
- 1973-10-12 JP JP11388373A patent/JPS5066178A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54149590A (en) * | 1978-05-15 | 1979-11-22 | Gen Instrument Corp | Method of measuring electric characteristics of semiconductor device during process |
| JPS5710572B2 (en) * | 1978-05-15 | 1982-02-26 |