JPS54136180A - Position detecting method for chip on semiconductor wafer - Google Patents

Position detecting method for chip on semiconductor wafer

Info

Publication number
JPS54136180A
JPS54136180A JP4322678A JP4322678A JPS54136180A JP S54136180 A JPS54136180 A JP S54136180A JP 4322678 A JP4322678 A JP 4322678A JP 4322678 A JP4322678 A JP 4322678A JP S54136180 A JPS54136180 A JP S54136180A
Authority
JP
Japan
Prior art keywords
area
detection
signal
chip
high accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4322678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS624851B2 (enrdf_load_stackoverflow
Inventor
Tomohiro Kuji
Yukio Kenbo
Hiroshi Makihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4322678A priority Critical patent/JPS54136180A/ja
Priority to US05/964,353 priority patent/US4213117A/en
Publication of JPS54136180A publication Critical patent/JPS54136180A/ja
Publication of JPS624851B2 publication Critical patent/JPS624851B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP4322678A 1977-11-28 1978-04-14 Position detecting method for chip on semiconductor wafer Granted JPS54136180A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4322678A JPS54136180A (en) 1978-04-14 1978-04-14 Position detecting method for chip on semiconductor wafer
US05/964,353 US4213117A (en) 1977-11-28 1978-11-28 Method and apparatus for detecting positions of chips on a semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4322678A JPS54136180A (en) 1978-04-14 1978-04-14 Position detecting method for chip on semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS54136180A true JPS54136180A (en) 1979-10-23
JPS624851B2 JPS624851B2 (enrdf_load_stackoverflow) 1987-02-02

Family

ID=12657990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4322678A Granted JPS54136180A (en) 1977-11-28 1978-04-14 Position detecting method for chip on semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS54136180A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854648A (ja) * 1981-09-28 1983-03-31 Nippon Kogaku Kk <Nikon> 位置合わせ装置
JPS58192323A (ja) * 1982-05-07 1983-11-09 Hitachi Ltd パタ−ン検出光学装置
JPS609126A (ja) * 1983-06-29 1985-01-18 Hitachi Ltd 縮小投影式アライメント方法およびその装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429977A (en) * 1977-08-10 1979-03-06 Hitachi Ltd Detection system for position

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429977A (en) * 1977-08-10 1979-03-06 Hitachi Ltd Detection system for position

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854648A (ja) * 1981-09-28 1983-03-31 Nippon Kogaku Kk <Nikon> 位置合わせ装置
JPS58192323A (ja) * 1982-05-07 1983-11-09 Hitachi Ltd パタ−ン検出光学装置
JPS609126A (ja) * 1983-06-29 1985-01-18 Hitachi Ltd 縮小投影式アライメント方法およびその装置

Also Published As

Publication number Publication date
JPS624851B2 (enrdf_load_stackoverflow) 1987-02-02

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