JPS54134964A - Manufacture of carbide field emitter - Google Patents

Manufacture of carbide field emitter

Info

Publication number
JPS54134964A
JPS54134964A JP4218378A JP4218378A JPS54134964A JP S54134964 A JPS54134964 A JP S54134964A JP 4218378 A JP4218378 A JP 4218378A JP 4218378 A JP4218378 A JP 4218378A JP S54134964 A JPS54134964 A JP S54134964A
Authority
JP
Japan
Prior art keywords
chip
field emitter
tip
carbide
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4218378A
Other languages
Japanese (ja)
Other versions
JPS6013258B2 (en
Inventor
Hisao Hojo
Hajime Shimizu
Masatoshi Ono
Takeo Ichinokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP53042183A priority Critical patent/JPS6013258B2/en
Publication of JPS54134964A publication Critical patent/JPS54134964A/en
Publication of JPS6013258B2 publication Critical patent/JPS6013258B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)

Abstract

PURPOSE:To realize a method of manufacturing a crystalline carbide field emitter which suits to the electron-beam source of an electron-beam applied apparatus such as an electron microscope. CONSTITUTION:Material 1 made of penetration type carbide formation metal is formed in a chip shape by electrolytic polishing. Next, the chip is heat-annealed under vacuum to make the tip of the chip into a single-crystal grain. Then, tip 2' of the chip is made smooth and hemispherical to less than 1mum, by heating under vacuum or in inert gas. After the above-mentioned shaping, a high-temperature heat treatment is carried out in hydrocarbon gas to obtain the carbide field emitter with carbide metal single crystal (a) at tip part 2. The field emitter obtained in this way is low in work function and the chip tip emitting electrons is a smooth hemisphere of less then 1mum in curvature radius, so that the reproducibility of the directional distribution of emitted electrons will be excellent.
JP53042183A 1978-04-12 1978-04-12 Manufacturing method of carbide field emitter Expired JPS6013258B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53042183A JPS6013258B2 (en) 1978-04-12 1978-04-12 Manufacturing method of carbide field emitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53042183A JPS6013258B2 (en) 1978-04-12 1978-04-12 Manufacturing method of carbide field emitter

Publications (2)

Publication Number Publication Date
JPS54134964A true JPS54134964A (en) 1979-10-19
JPS6013258B2 JPS6013258B2 (en) 1985-04-05

Family

ID=12628876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53042183A Expired JPS6013258B2 (en) 1978-04-12 1978-04-12 Manufacturing method of carbide field emitter

Country Status (1)

Country Link
JP (1) JPS6013258B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014727A (en) * 1983-07-07 1985-01-25 Anelva Corp Nitride field emitter and production process thereof
JPH02220337A (en) * 1989-02-21 1990-09-03 Matsushita Electric Ind Co Ltd Field emission type coil cathode
EP0457253A2 (en) * 1990-05-16 1991-11-21 Matsushita Electric Industrial Co., Ltd. Cantilever stylus for use in an atomic force microscope and method of making same
US7828622B1 (en) * 2007-10-25 2010-11-09 Kla-Tencor Technologies Corporation Sharpening metal carbide emitters

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053234Y2 (en) * 1985-06-11 1993-01-26

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014727A (en) * 1983-07-07 1985-01-25 Anelva Corp Nitride field emitter and production process thereof
JPH02220337A (en) * 1989-02-21 1990-09-03 Matsushita Electric Ind Co Ltd Field emission type coil cathode
EP0457253A2 (en) * 1990-05-16 1991-11-21 Matsushita Electric Industrial Co., Ltd. Cantilever stylus for use in an atomic force microscope and method of making same
US5336369A (en) * 1990-05-16 1994-08-09 Matsushita Electric Industrial Co., Ltd. Method of making a cantilever stylus for an atomic force microscope
US7828622B1 (en) * 2007-10-25 2010-11-09 Kla-Tencor Technologies Corporation Sharpening metal carbide emitters

Also Published As

Publication number Publication date
JPS6013258B2 (en) 1985-04-05

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