JPS54130883A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS54130883A
JPS54130883A JP3746378A JP3746378A JPS54130883A JP S54130883 A JPS54130883 A JP S54130883A JP 3746378 A JP3746378 A JP 3746378A JP 3746378 A JP3746378 A JP 3746378A JP S54130883 A JPS54130883 A JP S54130883A
Authority
JP
Japan
Prior art keywords
film
type
exposed
source
side face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3746378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6231507B2 (en, 2012
Inventor
Minoru Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP3746378A priority Critical patent/JPS54130883A/ja
Publication of JPS54130883A publication Critical patent/JPS54130883A/ja
Publication of JPS6231507B2 publication Critical patent/JPS6231507B2/ja
Granted legal-status Critical Current

Links

JP3746378A 1978-04-01 1978-04-01 Production of semiconductor device Granted JPS54130883A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3746378A JPS54130883A (en) 1978-04-01 1978-04-01 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3746378A JPS54130883A (en) 1978-04-01 1978-04-01 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS54130883A true JPS54130883A (en) 1979-10-11
JPS6231507B2 JPS6231507B2 (en, 2012) 1987-07-08

Family

ID=12498209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3746378A Granted JPS54130883A (en) 1978-04-01 1978-04-01 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS54130883A (en, 2012)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56152290A (en) * 1980-03-31 1981-11-25 Western Electric Co Method of manufacturing mesa device from semiconductor body
US4447823A (en) * 1980-03-12 1984-05-08 Tokyo Shibaura Denki Kabushiki Kaisha SOS p--n Junction device with a thick oxide wiring insulation layer
US4533934A (en) * 1980-10-02 1985-08-06 Westinghouse Electric Corp. Device structures for high density integrated circuits
JPS62209862A (ja) * 1986-03-10 1987-09-16 Matsushita Electric Ind Co Ltd 薄膜半導体デバイス
US5396099A (en) * 1990-11-28 1995-03-07 Nec Corporation MOS type semiconductor device having a high ON current/OFF current ratio

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4447823A (en) * 1980-03-12 1984-05-08 Tokyo Shibaura Denki Kabushiki Kaisha SOS p--n Junction device with a thick oxide wiring insulation layer
JPS56152290A (en) * 1980-03-31 1981-11-25 Western Electric Co Method of manufacturing mesa device from semiconductor body
US4533934A (en) * 1980-10-02 1985-08-06 Westinghouse Electric Corp. Device structures for high density integrated circuits
JPS62209862A (ja) * 1986-03-10 1987-09-16 Matsushita Electric Ind Co Ltd 薄膜半導体デバイス
US5396099A (en) * 1990-11-28 1995-03-07 Nec Corporation MOS type semiconductor device having a high ON current/OFF current ratio

Also Published As

Publication number Publication date
JPS6231507B2 (en, 2012) 1987-07-08

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