JPS5412735A - Photoetching of metal plate - Google Patents

Photoetching of metal plate

Info

Publication number
JPS5412735A
JPS5412735A JP7711177A JP7711177A JPS5412735A JP S5412735 A JPS5412735 A JP S5412735A JP 7711177 A JP7711177 A JP 7711177A JP 7711177 A JP7711177 A JP 7711177A JP S5412735 A JPS5412735 A JP S5412735A
Authority
JP
Japan
Prior art keywords
metal plate
photoetching
etched
etching
enhance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7711177A
Other languages
Japanese (ja)
Inventor
Yuzo Nakamura
Wakio Hashiguchi
Takeshi Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7711177A priority Critical patent/JPS5412735A/en
Publication of JPS5412735A publication Critical patent/JPS5412735A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE:To facilitate the detection of an etch pit which occurs on the surface of a metal plate below the photosensitive film at the time of etching and enhance a resolving power by providing a black film which can be etched on th surface to be etched.
JP7711177A 1977-06-30 1977-06-30 Photoetching of metal plate Pending JPS5412735A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7711177A JPS5412735A (en) 1977-06-30 1977-06-30 Photoetching of metal plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7711177A JPS5412735A (en) 1977-06-30 1977-06-30 Photoetching of metal plate

Publications (1)

Publication Number Publication Date
JPS5412735A true JPS5412735A (en) 1979-01-30

Family

ID=13624666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7711177A Pending JPS5412735A (en) 1977-06-30 1977-06-30 Photoetching of metal plate

Country Status (1)

Country Link
JP (1) JPS5412735A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4887903A (en) * 1972-02-24 1973-11-19
JPS498182A (en) * 1972-05-10 1974-01-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4887903A (en) * 1972-02-24 1973-11-19
JPS498182A (en) * 1972-05-10 1974-01-24

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