JPS54126460A - Laser scribing unit of semiconductor wafer - Google Patents

Laser scribing unit of semiconductor wafer

Info

Publication number
JPS54126460A
JPS54126460A JP3429778A JP3429778A JPS54126460A JP S54126460 A JPS54126460 A JP S54126460A JP 3429778 A JP3429778 A JP 3429778A JP 3429778 A JP3429778 A JP 3429778A JP S54126460 A JPS54126460 A JP S54126460A
Authority
JP
Japan
Prior art keywords
reflection light
semiconductor wafer
laser scribing
scribing unit
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3429778A
Other languages
Japanese (ja)
Inventor
Tatsutoshi Sensui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3429778A priority Critical patent/JPS54126460A/en
Publication of JPS54126460A publication Critical patent/JPS54126460A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent defects from occurring by detecting change of a laser reflection light quantity dependent upon slippage in scribing. CONSTITUTION:Detecting laser head 4 is provided near scribing laser head 3 to send reflection light 8 to detector circuit 6. Circuit 6 compares the reflection light qauntity and a set value with each other, and drives automatic stopping circuit 7 by signal 9 if the reflection light quantity is outside a rated value. Thus, defects are prevented from occurring.
JP3429778A 1978-03-24 1978-03-24 Laser scribing unit of semiconductor wafer Pending JPS54126460A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3429778A JPS54126460A (en) 1978-03-24 1978-03-24 Laser scribing unit of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3429778A JPS54126460A (en) 1978-03-24 1978-03-24 Laser scribing unit of semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS54126460A true JPS54126460A (en) 1979-10-01

Family

ID=12410215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3429778A Pending JPS54126460A (en) 1978-03-24 1978-03-24 Laser scribing unit of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS54126460A (en)

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