JPS54126460A - Laser scribing unit of semiconductor wafer - Google Patents
Laser scribing unit of semiconductor waferInfo
- Publication number
- JPS54126460A JPS54126460A JP3429778A JP3429778A JPS54126460A JP S54126460 A JPS54126460 A JP S54126460A JP 3429778 A JP3429778 A JP 3429778A JP 3429778 A JP3429778 A JP 3429778A JP S54126460 A JPS54126460 A JP S54126460A
- Authority
- JP
- Japan
- Prior art keywords
- reflection light
- semiconductor wafer
- laser scribing
- scribing unit
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3429778A JPS54126460A (en) | 1978-03-24 | 1978-03-24 | Laser scribing unit of semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3429778A JPS54126460A (en) | 1978-03-24 | 1978-03-24 | Laser scribing unit of semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54126460A true JPS54126460A (en) | 1979-10-01 |
Family
ID=12410215
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3429778A Pending JPS54126460A (en) | 1978-03-24 | 1978-03-24 | Laser scribing unit of semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54126460A (en) |
-
1978
- 1978-03-24 JP JP3429778A patent/JPS54126460A/en active Pending
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