JPS54119895A - Sound unit of piezoelectric thin type - Google Patents
Sound unit of piezoelectric thin typeInfo
- Publication number
- JPS54119895A JPS54119895A JP2681378A JP2681378A JPS54119895A JP S54119895 A JPS54119895 A JP S54119895A JP 2681378 A JP2681378 A JP 2681378A JP 2681378 A JP2681378 A JP 2681378A JP S54119895 A JPS54119895 A JP S54119895A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric thin
- thin film
- piezoelectric
- plate
- high frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 abstract 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 230000010355 oscillation Effects 0.000 abstract 2
- 229910000906 Bronze Inorganic materials 0.000 abstract 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 abstract 1
- 229910002113 barium titanate Inorganic materials 0.000 abstract 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 abstract 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 abstract 1
- 239000010974 bronze Substances 0.000 abstract 1
- QCUOBSQYDGUHHT-UHFFFAOYSA-L cadmium sulfate Chemical compound [Cd+2].[O-]S([O-])(=O)=O QCUOBSQYDGUHHT-UHFFFAOYSA-L 0.000 abstract 1
- 229910000331 cadmium sulfate Inorganic materials 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 abstract 1
- 239000000470 constituent Substances 0.000 abstract 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910001220 stainless steel Inorganic materials 0.000 abstract 1
- 239000010935 stainless steel Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 239000011787 zinc oxide Substances 0.000 abstract 1
- 229910001928 zirconium oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
PURPOSE:To establish the piezoelectric buzzer and speaker which are of thin type and driven with low voltage, by forming the piezoelectric thin film on the oscillation thin plate with high frequency sputter. CONSTITUTION:On the oscillation plate 5 consisting of metal thin plate, the piezoelectric thin film 6 is formed with high frequency sputter and the evaporation film 7 such as Au is formed as one electrode further on it. As the metal thin plate 5, stainless steel, phosphor bronze, and beryllium copper are used, and as the piezoelectric thin film 6, at least two types of oxides of lead, titanium, and zirconium, and zinc oxide, cadmium sulfate, and barium titanate as major constituent are used. Further, in sputtering, when magnetic field is produced at the back of the target 12 with permanent magnet or electromagnet 13, the ion density on the substrate 10 is increased and the piezoelectric thin film having comparative thick and excellent in the piezoelectricity can be obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2681378A JPS54119895A (en) | 1978-03-09 | 1978-03-09 | Sound unit of piezoelectric thin type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2681378A JPS54119895A (en) | 1978-03-09 | 1978-03-09 | Sound unit of piezoelectric thin type |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54119895A true JPS54119895A (en) | 1979-09-18 |
| JPS6130480B2 JPS6130480B2 (en) | 1986-07-14 |
Family
ID=12203718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2681378A Granted JPS54119895A (en) | 1978-03-09 | 1978-03-09 | Sound unit of piezoelectric thin type |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54119895A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110331312A (en) * | 2019-08-16 | 2019-10-15 | 苏州金江铜业有限公司 | Photomultiplier transit pole high beryllium copper continuous coating Rolling compund material and preparation method thereof |
-
1978
- 1978-03-09 JP JP2681378A patent/JPS54119895A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110331312A (en) * | 2019-08-16 | 2019-10-15 | 苏州金江铜业有限公司 | Photomultiplier transit pole high beryllium copper continuous coating Rolling compund material and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6130480B2 (en) | 1986-07-14 |
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