JPS54118778A - Method of detecting pattern - Google Patents
Method of detecting patternInfo
- Publication number
- JPS54118778A JPS54118778A JP2548278A JP2548278A JPS54118778A JP S54118778 A JPS54118778 A JP S54118778A JP 2548278 A JP2548278 A JP 2548278A JP 2548278 A JP2548278 A JP 2548278A JP S54118778 A JPS54118778 A JP S54118778A
- Authority
- JP
- Japan
- Prior art keywords
- detecting pattern
- pattern
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2548278A JPS54118778A (en) | 1978-03-08 | 1978-03-08 | Method of detecting pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2548278A JPS54118778A (en) | 1978-03-08 | 1978-03-08 | Method of detecting pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54118778A true JPS54118778A (en) | 1979-09-14 |
JPS5616544B2 JPS5616544B2 (en) | 1981-04-16 |
Family
ID=12167261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2548278A Granted JPS54118778A (en) | 1978-03-08 | 1978-03-08 | Method of detecting pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54118778A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5683031A (en) * | 1979-12-12 | 1981-07-07 | Fujitsu Ltd | Detecting method of mark position |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52109694A (en) * | 1976-03-11 | 1977-09-14 | Nippon Electron Optics Lab | Method of detecting mark position in machining charge particle wire |
-
1978
- 1978-03-08 JP JP2548278A patent/JPS54118778A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52109694A (en) * | 1976-03-11 | 1977-09-14 | Nippon Electron Optics Lab | Method of detecting mark position in machining charge particle wire |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5683031A (en) * | 1979-12-12 | 1981-07-07 | Fujitsu Ltd | Detecting method of mark position |
JPS6142409B2 (en) * | 1979-12-12 | 1986-09-20 | Fujitsu Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5616544B2 (en) | 1981-04-16 |
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