JPS54118778A - Method of detecting pattern - Google Patents

Method of detecting pattern

Info

Publication number
JPS54118778A
JPS54118778A JP2548278A JP2548278A JPS54118778A JP S54118778 A JPS54118778 A JP S54118778A JP 2548278 A JP2548278 A JP 2548278A JP 2548278 A JP2548278 A JP 2548278A JP S54118778 A JPS54118778 A JP S54118778A
Authority
JP
Japan
Prior art keywords
detecting pattern
pattern
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2548278A
Other languages
Japanese (ja)
Other versions
JPS5616544B2 (en
Inventor
Mamoru Nakasuji
Hisaaki Aizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP2548278A priority Critical patent/JPS54118778A/en
Publication of JPS54118778A publication Critical patent/JPS54118778A/en
Publication of JPS5616544B2 publication Critical patent/JPS5616544B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
JP2548278A 1978-03-08 1978-03-08 Method of detecting pattern Granted JPS54118778A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2548278A JPS54118778A (en) 1978-03-08 1978-03-08 Method of detecting pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2548278A JPS54118778A (en) 1978-03-08 1978-03-08 Method of detecting pattern

Publications (2)

Publication Number Publication Date
JPS54118778A true JPS54118778A (en) 1979-09-14
JPS5616544B2 JPS5616544B2 (en) 1981-04-16

Family

ID=12167261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2548278A Granted JPS54118778A (en) 1978-03-08 1978-03-08 Method of detecting pattern

Country Status (1)

Country Link
JP (1) JPS54118778A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5683031A (en) * 1979-12-12 1981-07-07 Fujitsu Ltd Detecting method of mark position

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52109694A (en) * 1976-03-11 1977-09-14 Nippon Electron Optics Lab Method of detecting mark position in machining charge particle wire

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52109694A (en) * 1976-03-11 1977-09-14 Nippon Electron Optics Lab Method of detecting mark position in machining charge particle wire

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5683031A (en) * 1979-12-12 1981-07-07 Fujitsu Ltd Detecting method of mark position
JPS6142409B2 (en) * 1979-12-12 1986-09-20 Fujitsu Ltd

Also Published As

Publication number Publication date
JPS5616544B2 (en) 1981-04-16

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