JPS52109694A - Method of detecting mark position in machining charge particle wire - Google Patents
Method of detecting mark position in machining charge particle wireInfo
- Publication number
- JPS52109694A JPS52109694A JP2637776A JP2637776A JPS52109694A JP S52109694 A JPS52109694 A JP S52109694A JP 2637776 A JP2637776 A JP 2637776A JP 2637776 A JP2637776 A JP 2637776A JP S52109694 A JPS52109694 A JP S52109694A
- Authority
- JP
- Japan
- Prior art keywords
- machining
- mark position
- charge particle
- detecting mark
- particle wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2637776A JPS52109694A (en) | 1976-03-11 | 1976-03-11 | Method of detecting mark position in machining charge particle wire |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2637776A JPS52109694A (en) | 1976-03-11 | 1976-03-11 | Method of detecting mark position in machining charge particle wire |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52109694A true JPS52109694A (en) | 1977-09-14 |
JPS5638055B2 JPS5638055B2 (en) | 1981-09-03 |
Family
ID=12191816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2637776A Granted JPS52109694A (en) | 1976-03-11 | 1976-03-11 | Method of detecting mark position in machining charge particle wire |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52109694A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54118778A (en) * | 1978-03-08 | 1979-09-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of detecting pattern |
JPS58105543A (en) * | 1981-12-03 | 1983-06-23 | エテック・システムズ・インコーポレイテッド | Method of drawing feature of gate array |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60195758U (en) * | 1984-06-02 | 1985-12-27 | 飯田商事株式会社 | Cap equipped with oxygen absorber |
-
1976
- 1976-03-11 JP JP2637776A patent/JPS52109694A/en active Granted
Non-Patent Citations (1)
Title |
---|
IEEE TRANSACTIONS ON ELECTRON DEVICES=1975 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54118778A (en) * | 1978-03-08 | 1979-09-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of detecting pattern |
JPS5616544B2 (en) * | 1978-03-08 | 1981-04-16 | ||
JPS58105543A (en) * | 1981-12-03 | 1983-06-23 | エテック・システムズ・インコーポレイテッド | Method of drawing feature of gate array |
Also Published As
Publication number | Publication date |
---|---|
JPS5638055B2 (en) | 1981-09-03 |
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