JPS54117679A - Liquid-phase epitaxial growth unit - Google Patents

Liquid-phase epitaxial growth unit

Info

Publication number
JPS54117679A
JPS54117679A JP2480678A JP2480678A JPS54117679A JP S54117679 A JPS54117679 A JP S54117679A JP 2480678 A JP2480678 A JP 2480678A JP 2480678 A JP2480678 A JP 2480678A JP S54117679 A JPS54117679 A JP S54117679A
Authority
JP
Japan
Prior art keywords
melting liquid
liquid
composition
transitional
continuously
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2480678A
Other languages
Japanese (ja)
Inventor
Ryoichi Hirano
Toshio Tanaka
Jun Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2480678A priority Critical patent/JPS54117679A/en
Publication of JPS54117679A publication Critical patent/JPS54117679A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To perform an epitaxial growth having a region, where the composition is transitional continuously, by mixture and diffusion generated in boundaries between melting liquid by leading melting liquid different in composition into a growing room simultaneously.
CONSTITUTION: After the completion of the growth dependent upon melting liquid 2, slider 9 is moved to link liquid tanks 5a and 5b with each other in 12. Next, when slider 8 is moved to the left and pressing-out pieces 7b and 7c are depressed simultaneously, melting liquid 3a and 3b in tanks 5a and 5b ress out processed melting liquid 2 into tank 14. Simultaneously, melting liquid 3a and 3b pressed out newly are pressed into growing room 11 while generating mixture and diffusion in the boundary part and act on crystal substrate 10 as melting liquid having a continuously transitional composition distribution in room 11. As a result, a region where the composition is continuously transitional is formed in the epi-grown layer on substrate 10.
COPYRIGHT: (C)1979,JPO&Japio
JP2480678A 1978-03-03 1978-03-03 Liquid-phase epitaxial growth unit Pending JPS54117679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2480678A JPS54117679A (en) 1978-03-03 1978-03-03 Liquid-phase epitaxial growth unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2480678A JPS54117679A (en) 1978-03-03 1978-03-03 Liquid-phase epitaxial growth unit

Publications (1)

Publication Number Publication Date
JPS54117679A true JPS54117679A (en) 1979-09-12

Family

ID=12148427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2480678A Pending JPS54117679A (en) 1978-03-03 1978-03-03 Liquid-phase epitaxial growth unit

Country Status (1)

Country Link
JP (1) JPS54117679A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397260A (en) * 1980-04-23 1983-08-09 U.S. Philips Corporation Boat for the epitaxial growth of several layers from the liquid phase
JP2012235017A (en) * 2011-05-06 2012-11-29 Shimane Univ Thermoelectric conversion material manufacturing apparatus and thermoelectric conversion material manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397260A (en) * 1980-04-23 1983-08-09 U.S. Philips Corporation Boat for the epitaxial growth of several layers from the liquid phase
JP2012235017A (en) * 2011-05-06 2012-11-29 Shimane Univ Thermoelectric conversion material manufacturing apparatus and thermoelectric conversion material manufacturing method

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