JPS54104287A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS54104287A
JPS54104287A JP1049778A JP1049778A JPS54104287A JP S54104287 A JPS54104287 A JP S54104287A JP 1049778 A JP1049778 A JP 1049778A JP 1049778 A JP1049778 A JP 1049778A JP S54104287 A JPS54104287 A JP S54104287A
Authority
JP
Japan
Prior art keywords
carbon fiber
complex
copper
size
brazing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1049778A
Other languages
Japanese (ja)
Other versions
JPS5816615B2 (en
Inventor
Hideo Arakawa
Keiichi Kuniya
Masabumi Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1049778A priority Critical patent/JPS5816615B2/en
Publication of JPS54104287A publication Critical patent/JPS54104287A/en
Publication of JPS5816615B2 publication Critical patent/JPS5816615B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE:To make the support-electrode size of a copper-carbon fiber complex substantially unchangeable before or after the manufacture of a device. CONSTITUTION:Support electrode 1 of a copper-carbon fiber complex, when brazed to package 2, is heated at its maximum, so that its size will vary. As the elastic energy of carbon fiber is emitted by heating, a protrusion is made on the brazing surface of the support electrode, so that a brazing defect will be caused. After temporary heating, however, the size will not vary by second heating below the previous temperature. That results from that as copper become soft, the elastic energy of the carbon fiber is emitted to allow the complex to be close to its steady state. Before being built in the device, the complex is heated up to the brazing temperature of the package and support electrode or above, so that the size variation can be suppressed. In addition, carbon fiber is contained to 30% or more the complex is buried in copper or copper alloy spirally to obtain small thermal expansivity and excellent thermal conductivity; and then, it is the most effective to use the spiral surface as a junction surface to the semiconductor.
JP1049778A 1978-02-03 1978-02-03 Manufacturing method of semiconductor device Expired JPS5816615B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1049778A JPS5816615B2 (en) 1978-02-03 1978-02-03 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1049778A JPS5816615B2 (en) 1978-02-03 1978-02-03 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS54104287A true JPS54104287A (en) 1979-08-16
JPS5816615B2 JPS5816615B2 (en) 1983-04-01

Family

ID=11751821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1049778A Expired JPS5816615B2 (en) 1978-02-03 1978-02-03 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5816615B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290819U (en) * 1988-12-30 1990-07-18

Also Published As

Publication number Publication date
JPS5816615B2 (en) 1983-04-01

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