JPS5399880A - Manufacture of circuit element structure - Google Patents

Manufacture of circuit element structure

Info

Publication number
JPS5399880A
JPS5399880A JP1411577A JP1411577A JPS5399880A JP S5399880 A JPS5399880 A JP S5399880A JP 1411577 A JP1411577 A JP 1411577A JP 1411577 A JP1411577 A JP 1411577A JP S5399880 A JPS5399880 A JP S5399880A
Authority
JP
Japan
Prior art keywords
sio
manufacture
circuit element
element structure
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1411577A
Other languages
Japanese (ja)
Inventor
Kiyoshi Hisatomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1411577A priority Critical patent/JPS5399880A/en
Publication of JPS5399880A publication Critical patent/JPS5399880A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)

Abstract

PURPOSE: To omit a bonding process by forming the wiring between the terminal provided to the insulating substrate composed of Si3N4, SiO2, etc., and the SiO2 film electrically isolated by a groove after pressure-welding a Si substrate onto the insulating substrate, by forming mutually-isolated circuit elements on the Si substrate, and covering it with the SiO2 film.
COPYRIGHT: (C)1978,JPO&Japio
JP1411577A 1977-02-14 1977-02-14 Manufacture of circuit element structure Pending JPS5399880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1411577A JPS5399880A (en) 1977-02-14 1977-02-14 Manufacture of circuit element structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1411577A JPS5399880A (en) 1977-02-14 1977-02-14 Manufacture of circuit element structure

Publications (1)

Publication Number Publication Date
JPS5399880A true JPS5399880A (en) 1978-08-31

Family

ID=11852109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1411577A Pending JPS5399880A (en) 1977-02-14 1977-02-14 Manufacture of circuit element structure

Country Status (1)

Country Link
JP (1) JPS5399880A (en)

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