JPS5399877A - Manufacture of mesa transistor - Google Patents

Manufacture of mesa transistor

Info

Publication number
JPS5399877A
JPS5399877A JP1425277A JP1425277A JPS5399877A JP S5399877 A JPS5399877 A JP S5399877A JP 1425277 A JP1425277 A JP 1425277A JP 1425277 A JP1425277 A JP 1425277A JP S5399877 A JPS5399877 A JP S5399877A
Authority
JP
Japan
Prior art keywords
manufacture
mesa
transistor
mesa transistor
wax
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1425277A
Other languages
Japanese (ja)
Inventor
Norio Yoshihara
Hiroyuki Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1425277A priority Critical patent/JPS5399877A/en
Publication of JPS5399877A publication Critical patent/JPS5399877A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Thyristors (AREA)

Abstract

PURPOSE: To obtain the transistor with uniform characteristics by etching and removing the work distortion occurring while the surface of the wafer on which semiconductor devices are formed is covered with wax, its reverse surface is fixed to the support board, and a fine groove for a mesa reaching the base-collector junction is formed along the element boundary line.
COPYRIGHT: (C)1978,JPO&Japio
JP1425277A 1977-02-14 1977-02-14 Manufacture of mesa transistor Pending JPS5399877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1425277A JPS5399877A (en) 1977-02-14 1977-02-14 Manufacture of mesa transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1425277A JPS5399877A (en) 1977-02-14 1977-02-14 Manufacture of mesa transistor

Publications (1)

Publication Number Publication Date
JPS5399877A true JPS5399877A (en) 1978-08-31

Family

ID=11855891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1425277A Pending JPS5399877A (en) 1977-02-14 1977-02-14 Manufacture of mesa transistor

Country Status (1)

Country Link
JP (1) JPS5399877A (en)

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