JPS5396769A - Production of mis integratd circuit - Google Patents

Production of mis integratd circuit

Info

Publication number
JPS5396769A
JPS5396769A JP1135977A JP1135977A JPS5396769A JP S5396769 A JPS5396769 A JP S5396769A JP 1135977 A JP1135977 A JP 1135977A JP 1135977 A JP1135977 A JP 1135977A JP S5396769 A JPS5396769 A JP S5396769A
Authority
JP
Japan
Prior art keywords
production
mis
integratd
circuit
integratd circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1135977A
Other languages
Japanese (ja)
Inventor
Susumu Muramoto
Tetsuo Hosoya
Junichi Murota
Minoru Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1135977A priority Critical patent/JPS5396769A/en
Publication of JPS5396769A publication Critical patent/JPS5396769A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To achieve high density and high integration by opening connection holes through self-alignment during production of Si gate MISISIC.
COPYRIGHT: (C)1978,JPO&Japio
JP1135977A 1977-02-04 1977-02-04 Production of mis integratd circuit Pending JPS5396769A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1135977A JPS5396769A (en) 1977-02-04 1977-02-04 Production of mis integratd circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1135977A JPS5396769A (en) 1977-02-04 1977-02-04 Production of mis integratd circuit

Publications (1)

Publication Number Publication Date
JPS5396769A true JPS5396769A (en) 1978-08-24

Family

ID=11775823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1135977A Pending JPS5396769A (en) 1977-02-04 1977-02-04 Production of mis integratd circuit

Country Status (1)

Country Link
JP (1) JPS5396769A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562750A (en) * 1978-11-06 1980-05-12 Seiko Epson Corp Semiconductor integrated circuit device
JPS56125860A (en) * 1980-03-06 1981-10-02 Seiko Epson Corp Manufacture of semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112187A (en) * 1975-03-28 1976-10-04 Matsushita Electric Ind Co Ltd Processing method of semiconductor equipment
JPS5272582A (en) * 1975-12-15 1977-06-17 Matsushita Electric Ind Co Ltd Production of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112187A (en) * 1975-03-28 1976-10-04 Matsushita Electric Ind Co Ltd Processing method of semiconductor equipment
JPS5272582A (en) * 1975-12-15 1977-06-17 Matsushita Electric Ind Co Ltd Production of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562750A (en) * 1978-11-06 1980-05-12 Seiko Epson Corp Semiconductor integrated circuit device
JPS56125860A (en) * 1980-03-06 1981-10-02 Seiko Epson Corp Manufacture of semiconductor device

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