JPS539475A - Device for detecting position of electron beam - Google Patents

Device for detecting position of electron beam

Info

Publication number
JPS539475A
JPS539475A JP7564077A JP7564077A JPS539475A JP S539475 A JPS539475 A JP S539475A JP 7564077 A JP7564077 A JP 7564077A JP 7564077 A JP7564077 A JP 7564077A JP S539475 A JPS539475 A JP S539475A
Authority
JP
Japan
Prior art keywords
electron beam
detecting position
detecting
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7564077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5343023B2 (cg-RX-API-DMAC7.html
Inventor
Ii Deebisu Donarudo
Ei Habetsugaa Miraado
Esu Yooku Hanon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS539475A publication Critical patent/JPS539475A/ja
Publication of JPS5343023B2 publication Critical patent/JPS5343023B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/39—Scanning a visible indication of the measured value and reproducing this indication at the remote place, e.g. on the screen of a cathode ray tube

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
JP7564077A 1976-07-12 1977-06-27 Device for detecting position of electron beam Granted JPS539475A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70460576A 1976-07-12 1976-07-12

Publications (2)

Publication Number Publication Date
JPS539475A true JPS539475A (en) 1978-01-27
JPS5343023B2 JPS5343023B2 (cg-RX-API-DMAC7.html) 1978-11-16

Family

ID=24830188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7564077A Granted JPS539475A (en) 1976-07-12 1977-06-27 Device for detecting position of electron beam

Country Status (3)

Country Link
JP (1) JPS539475A (cg-RX-API-DMAC7.html)
BR (1) BR7704576A (cg-RX-API-DMAC7.html)
SE (1) SE414833B (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54107677A (en) * 1978-02-10 1979-08-23 Jeol Ltd Rotation error detection method of apperture in electronic ray exposure and its unit
JPS5512784A (en) * 1978-07-14 1980-01-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Location mark for electron beam exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54107677A (en) * 1978-02-10 1979-08-23 Jeol Ltd Rotation error detection method of apperture in electronic ray exposure and its unit
JPS5512784A (en) * 1978-07-14 1980-01-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Location mark for electron beam exposure

Also Published As

Publication number Publication date
SE7707933L (sv) 1978-01-13
JPS5343023B2 (cg-RX-API-DMAC7.html) 1978-11-16
SE414833B (sv) 1980-08-18
BR7704576A (pt) 1978-04-04

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