BR7704576A - Aparelho para detectar marcas de posicionamento em um alvo tal como uma lamina semicondutora - Google Patents

Aparelho para detectar marcas de posicionamento em um alvo tal como uma lamina semicondutora

Info

Publication number
BR7704576A
BR7704576A BR7704576A BR7704576A BR7704576A BR 7704576 A BR7704576 A BR 7704576A BR 7704576 A BR7704576 A BR 7704576A BR 7704576 A BR7704576 A BR 7704576A BR 7704576 A BR7704576 A BR 7704576A
Authority
BR
Brazil
Prior art keywords
target
positioning marks
detect positioning
semiconductive
blade
Prior art date
Application number
BR7704576A
Other languages
English (en)
Portuguese (pt)
Inventor
M Habegger
D Davis
H Yourke
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of BR7704576A publication Critical patent/BR7704576A/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/39—Scanning a visible indication of the measured value and reproducing this indication at the remote place, e.g. on the screen of a cathode ray tube

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
BR7704576A 1976-07-12 1977-07-12 Aparelho para detectar marcas de posicionamento em um alvo tal como uma lamina semicondutora BR7704576A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70460576A 1976-07-12 1976-07-12

Publications (1)

Publication Number Publication Date
BR7704576A true BR7704576A (pt) 1978-04-04

Family

ID=24830188

Family Applications (1)

Application Number Title Priority Date Filing Date
BR7704576A BR7704576A (pt) 1976-07-12 1977-07-12 Aparelho para detectar marcas de posicionamento em um alvo tal como uma lamina semicondutora

Country Status (3)

Country Link
JP (1) JPS539475A (cg-RX-API-DMAC7.html)
BR (1) BR7704576A (cg-RX-API-DMAC7.html)
SE (1) SE414833B (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54107677A (en) * 1978-02-10 1979-08-23 Jeol Ltd Rotation error detection method of apperture in electronic ray exposure and its unit
JPS5512784A (en) * 1978-07-14 1980-01-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Location mark for electron beam exposure

Also Published As

Publication number Publication date
JPS539475A (en) 1978-01-27
SE7707933L (sv) 1978-01-13
JPS5343023B2 (cg-RX-API-DMAC7.html) 1978-11-16
SE414833B (sv) 1980-08-18

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