JPS539475A - Device for detecting position of electron beam - Google Patents
Device for detecting position of electron beamInfo
- Publication number
- JPS539475A JPS539475A JP7564077A JP7564077A JPS539475A JP S539475 A JPS539475 A JP S539475A JP 7564077 A JP7564077 A JP 7564077A JP 7564077 A JP7564077 A JP 7564077A JP S539475 A JPS539475 A JP S539475A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- detecting position
- detecting
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/39—Scanning a visible indication of the measured value and reproducing this indication at the remote place, e.g. on the screen of a cathode ray tube
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US70460576A | 1976-07-12 | 1976-07-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS539475A true JPS539475A (en) | 1978-01-27 |
JPS5343023B2 JPS5343023B2 (en) | 1978-11-16 |
Family
ID=24830188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7564077A Granted JPS539475A (en) | 1976-07-12 | 1977-06-27 | Device for detecting position of electron beam |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS539475A (en) |
BR (1) | BR7704576A (en) |
SE (1) | SE414833B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54107677A (en) * | 1978-02-10 | 1979-08-23 | Jeol Ltd | Rotation error detection method of apperture in electronic ray exposure and its unit |
JPS5512784A (en) * | 1978-07-14 | 1980-01-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Location mark for electron beam exposure |
-
1977
- 1977-06-27 JP JP7564077A patent/JPS539475A/en active Granted
- 1977-07-07 SE SE7707933-3A patent/SE414833B/en not_active IP Right Cessation
- 1977-07-12 BR BR7704576A patent/BR7704576A/en unknown
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54107677A (en) * | 1978-02-10 | 1979-08-23 | Jeol Ltd | Rotation error detection method of apperture in electronic ray exposure and its unit |
JPS5549768B2 (en) * | 1978-02-10 | 1980-12-13 | ||
JPS5512784A (en) * | 1978-07-14 | 1980-01-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Location mark for electron beam exposure |
JPS6246976B2 (en) * | 1978-07-14 | 1987-10-06 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai |
Also Published As
Publication number | Publication date |
---|---|
BR7704576A (en) | 1978-04-04 |
SE7707933L (en) | 1978-01-13 |
SE414833B (en) | 1980-08-18 |
JPS5343023B2 (en) | 1978-11-16 |
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