JPS5392391A - Continuous evaporating apparatus - Google Patents

Continuous evaporating apparatus

Info

Publication number
JPS5392391A
JPS5392391A JP13548177A JP13548177A JPS5392391A JP S5392391 A JPS5392391 A JP S5392391A JP 13548177 A JP13548177 A JP 13548177A JP 13548177 A JP13548177 A JP 13548177A JP S5392391 A JPS5392391 A JP S5392391A
Authority
JP
Japan
Prior art keywords
evaporating apparatus
evaporation
continuous evaporating
air
evaproating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13548177A
Other languages
Japanese (ja)
Inventor
Mitsuo Kakehi
Keijiro Nishida
Tadayoshi Kasahara
Masao Shimabayashi
Ryozo Hiraga
Tomomasa Nakano
Ichiro Komatsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP13548177A priority Critical patent/JPS5392391A/en
Publication of JPS5392391A publication Critical patent/JPS5392391A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To provide an evaproating apparatus which is capable of producing excellently evaproated surface without adhering dust floated inthe air by constituting the apparatus so that the dome, to which evaporation substrate are fixed, once transferred into a heating chamber never contacts with the air until the evaporation on both side is completed.
JP13548177A 1977-11-11 1977-11-11 Continuous evaporating apparatus Pending JPS5392391A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13548177A JPS5392391A (en) 1977-11-11 1977-11-11 Continuous evaporating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13548177A JPS5392391A (en) 1977-11-11 1977-11-11 Continuous evaporating apparatus

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4867473A Division JPS5315466B2 (en) 1973-04-28 1973-04-28

Publications (1)

Publication Number Publication Date
JPS5392391A true JPS5392391A (en) 1978-08-14

Family

ID=15152716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13548177A Pending JPS5392391A (en) 1977-11-11 1977-11-11 Continuous evaporating apparatus

Country Status (1)

Country Link
JP (1) JPS5392391A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60221572A (en) * 1984-03-24 1985-11-06 Anelva Corp Continuous discharge reaction treating device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134579A (en) * 1973-04-28 1974-12-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49134579A (en) * 1973-04-28 1974-12-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60221572A (en) * 1984-03-24 1985-11-06 Anelva Corp Continuous discharge reaction treating device

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