JPS5390856A - Attaching method of aperture electrode - Google Patents
Attaching method of aperture electrodeInfo
- Publication number
- JPS5390856A JPS5390856A JP620777A JP620777A JPS5390856A JP S5390856 A JPS5390856 A JP S5390856A JP 620777 A JP620777 A JP 620777A JP 620777 A JP620777 A JP 620777A JP S5390856 A JPS5390856 A JP S5390856A
- Authority
- JP
- Japan
- Prior art keywords
- aperture electrode
- attaching method
- electrode hole
- aperture
- highaccuracy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a beam spot featuring a small aberration by securing a highaccuracy coincidence of the center between the aperture electrode hole and the anode electrode hole.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP620777A JPS5390856A (en) | 1977-01-21 | 1977-01-21 | Attaching method of aperture electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP620777A JPS5390856A (en) | 1977-01-21 | 1977-01-21 | Attaching method of aperture electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5390856A true JPS5390856A (en) | 1978-08-10 |
Family
ID=11632078
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP620777A Pending JPS5390856A (en) | 1977-01-21 | 1977-01-21 | Attaching method of aperture electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5390856A (en) |
-
1977
- 1977-01-21 JP JP620777A patent/JPS5390856A/en active Pending
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