JPS5384467A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5384467A
JPS5384467A JP16024076A JP16024076A JPS5384467A JP S5384467 A JPS5384467 A JP S5384467A JP 16024076 A JP16024076 A JP 16024076A JP 16024076 A JP16024076 A JP 16024076A JP S5384467 A JPS5384467 A JP S5384467A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
electrode window
slope
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16024076A
Other languages
Japanese (ja)
Inventor
Atsushi Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16024076A priority Critical patent/JPS5384467A/en
Publication of JPS5384467A publication Critical patent/JPS5384467A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To know the slope value of the verge area of the electrode window from the slope at teh opening verge area after the thermal treatment, by securing an opening outside the element region simultaneously with the drilling of the electrode window.
COPYRIGHT: (C)1978,JPO&Japio
JP16024076A 1976-12-29 1976-12-29 Manufacture of semiconductor device Pending JPS5384467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16024076A JPS5384467A (en) 1976-12-29 1976-12-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16024076A JPS5384467A (en) 1976-12-29 1976-12-29 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5384467A true JPS5384467A (en) 1978-07-25

Family

ID=15710722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16024076A Pending JPS5384467A (en) 1976-12-29 1976-12-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5384467A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02224226A (en) * 1988-11-21 1990-09-06 Nippondenso Co Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02224226A (en) * 1988-11-21 1990-09-06 Nippondenso Co Ltd Manufacture of semiconductor device

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