JPS5384467A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5384467A JPS5384467A JP16024076A JP16024076A JPS5384467A JP S5384467 A JPS5384467 A JP S5384467A JP 16024076 A JP16024076 A JP 16024076A JP 16024076 A JP16024076 A JP 16024076A JP S5384467 A JPS5384467 A JP S5384467A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- electrode window
- slope
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To know the slope value of the verge area of the electrode window from the slope at teh opening verge area after the thermal treatment, by securing an opening outside the element region simultaneously with the drilling of the electrode window.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16024076A JPS5384467A (en) | 1976-12-29 | 1976-12-29 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16024076A JPS5384467A (en) | 1976-12-29 | 1976-12-29 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5384467A true JPS5384467A (en) | 1978-07-25 |
Family
ID=15710722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16024076A Pending JPS5384467A (en) | 1976-12-29 | 1976-12-29 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5384467A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02224226A (en) * | 1988-11-21 | 1990-09-06 | Nippondenso Co Ltd | Manufacture of semiconductor device |
-
1976
- 1976-12-29 JP JP16024076A patent/JPS5384467A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02224226A (en) * | 1988-11-21 | 1990-09-06 | Nippondenso Co Ltd | Manufacture of semiconductor device |
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