JPS5382279A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5382279A JPS5382279A JP15735676A JP15735676A JPS5382279A JP S5382279 A JPS5382279 A JP S5382279A JP 15735676 A JP15735676 A JP 15735676A JP 15735676 A JP15735676 A JP 15735676A JP S5382279 A JPS5382279 A JP S5382279A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production
- metal
- depositing
- electroless plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate pattern collapse and improve yield by performing etching after depositing a corrosion resistant metal on an metal electroplating layer by electroless plating at the time of forming wirings on a semiconductor device.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15735676A JPS5382279A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15735676A JPS5382279A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5382279A true JPS5382279A (en) | 1978-07-20 |
Family
ID=15647872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15735676A Pending JPS5382279A (en) | 1976-12-28 | 1976-12-28 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5382279A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63185045A (en) * | 1987-01-28 | 1988-07-30 | Mitsui Mining & Smelting Co Ltd | Conductive film circuit |
JPH0485930A (en) * | 1990-07-30 | 1992-03-18 | Fujitsu Ltd | Wiring pattern formation method |
-
1976
- 1976-12-28 JP JP15735676A patent/JPS5382279A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63185045A (en) * | 1987-01-28 | 1988-07-30 | Mitsui Mining & Smelting Co Ltd | Conductive film circuit |
JPH0485930A (en) * | 1990-07-30 | 1992-03-18 | Fujitsu Ltd | Wiring pattern formation method |
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