JPS5382181A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5382181A JPS5382181A JP15991676A JP15991676A JPS5382181A JP S5382181 A JPS5382181 A JP S5382181A JP 15991676 A JP15991676 A JP 15991676A JP 15991676 A JP15991676 A JP 15991676A JP S5382181 A JPS5382181 A JP S5382181A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- utilization
- forming
- ion injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15991676A JPS6043674B2 (ja) | 1976-12-27 | 1976-12-27 | Mos電界効果トランジスタの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15991676A JPS6043674B2 (ja) | 1976-12-27 | 1976-12-27 | Mos電界効果トランジスタの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5382181A true JPS5382181A (en) | 1978-07-20 |
JPS6043674B2 JPS6043674B2 (ja) | 1985-09-30 |
Family
ID=15703943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15991676A Expired JPS6043674B2 (ja) | 1976-12-27 | 1976-12-27 | Mos電界効果トランジスタの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6043674B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01107555A (ja) * | 1987-10-20 | 1989-04-25 | Matsushita Electric Ind Co Ltd | Mis型半導体装置およびその製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH023493Y2 (ja) * | 1985-02-05 | 1990-01-26 |
-
1976
- 1976-12-27 JP JP15991676A patent/JPS6043674B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01107555A (ja) * | 1987-10-20 | 1989-04-25 | Matsushita Electric Ind Co Ltd | Mis型半導体装置およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6043674B2 (ja) | 1985-09-30 |
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