JPS5380174A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5380174A JPS5380174A JP15676676A JP15676676A JPS5380174A JP S5380174 A JPS5380174 A JP S5380174A JP 15676676 A JP15676676 A JP 15676676A JP 15676676 A JP15676676 A JP 15676676A JP S5380174 A JPS5380174 A JP S5380174A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- separation groove
- emitter
- collector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51156766A JPS6037614B2 (ja) | 1976-12-25 | 1976-12-25 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51156766A JPS6037614B2 (ja) | 1976-12-25 | 1976-12-25 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5380174A true JPS5380174A (en) | 1978-07-15 |
JPS6037614B2 JPS6037614B2 (ja) | 1985-08-27 |
Family
ID=15634836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51156766A Expired JPS6037614B2 (ja) | 1976-12-25 | 1976-12-25 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6037614B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5661138A (en) * | 1979-10-23 | 1981-05-26 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5690559A (en) * | 1979-12-22 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5867060A (ja) * | 1981-10-19 | 1983-04-21 | Oki Electric Ind Co Ltd | 半導体集積回路装置の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5140866A (ja) * | 1974-10-04 | 1976-04-06 | Nippon Electric Co | Handotaisochi |
-
1976
- 1976-12-25 JP JP51156766A patent/JPS6037614B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5140866A (ja) * | 1974-10-04 | 1976-04-06 | Nippon Electric Co | Handotaisochi |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5661138A (en) * | 1979-10-23 | 1981-05-26 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5690559A (en) * | 1979-12-22 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5867060A (ja) * | 1981-10-19 | 1983-04-21 | Oki Electric Ind Co Ltd | 半導体集積回路装置の製造方法 |
JPH0239092B2 (ja) * | 1981-10-19 | 1990-09-04 | Oki Electric Ind Co Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS6037614B2 (ja) | 1985-08-27 |
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