JPS5379571A - Pattern inspecting apparatus - Google Patents

Pattern inspecting apparatus

Info

Publication number
JPS5379571A
JPS5379571A JP15488276A JP15488276A JPS5379571A JP S5379571 A JPS5379571 A JP S5379571A JP 15488276 A JP15488276 A JP 15488276A JP 15488276 A JP15488276 A JP 15488276A JP S5379571 A JPS5379571 A JP S5379571A
Authority
JP
Japan
Prior art keywords
inspecting apparatus
pattern inspecting
patterns
pattern
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15488276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6147362B2 (fr
Inventor
Toshimitsu Hamada
Yasuo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15488276A priority Critical patent/JPS5379571A/ja
Priority to US05/859,206 priority patent/US4162126A/en
Publication of JPS5379571A publication Critical patent/JPS5379571A/ja
Publication of JPS6147362B2 publication Critical patent/JPS6147362B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Analysis (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP15488276A 1976-12-10 1976-12-24 Pattern inspecting apparatus Granted JPS5379571A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15488276A JPS5379571A (en) 1976-12-24 1976-12-24 Pattern inspecting apparatus
US05/859,206 US4162126A (en) 1976-12-10 1977-12-09 Surface detect test apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15488276A JPS5379571A (en) 1976-12-24 1976-12-24 Pattern inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS5379571A true JPS5379571A (en) 1978-07-14
JPS6147362B2 JPS6147362B2 (fr) 1986-10-18

Family

ID=15594006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15488276A Granted JPS5379571A (en) 1976-12-10 1976-12-24 Pattern inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS5379571A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5837773A (ja) * 1981-08-28 1983-03-05 Fuji Electric Co Ltd 複数パタ−ン処理装置
JPS58158762A (ja) * 1982-03-13 1983-09-21 Ishida Scales Mfg Co Ltd 面積及び個数演算装置
JPS59216004A (ja) * 1983-05-23 1984-12-06 Mitsubishi Rayon Co Ltd 円形状物の測定方法
JPS6095309A (ja) * 1983-07-25 1985-05-28 ロイド　ドイル　リミテツド プリント配線基板を検査する方法および装置
JPS6363282A (ja) * 1986-09-04 1988-03-19 Yaskawa Electric Mfg Co Ltd 画像処理装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK3397884T3 (da) 2015-12-28 2020-08-03 Victaulic Co Of America Adapterkobling
US10859190B2 (en) 2016-05-16 2020-12-08 Victaulic Company Sprung coupling

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49111665A (fr) * 1973-02-22 1974-10-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49111665A (fr) * 1973-02-22 1974-10-24

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5837773A (ja) * 1981-08-28 1983-03-05 Fuji Electric Co Ltd 複数パタ−ン処理装置
JPS58158762A (ja) * 1982-03-13 1983-09-21 Ishida Scales Mfg Co Ltd 面積及び個数演算装置
JPH0338625B2 (fr) * 1982-03-13 1991-06-11 Ishida Koki Seisakusho Kk
JPS59216004A (ja) * 1983-05-23 1984-12-06 Mitsubishi Rayon Co Ltd 円形状物の測定方法
JPH0429964B2 (fr) * 1983-05-23 1992-05-20
JPS6095309A (ja) * 1983-07-25 1985-05-28 ロイド　ドイル　リミテツド プリント配線基板を検査する方法および装置
JPS6363282A (ja) * 1986-09-04 1988-03-19 Yaskawa Electric Mfg Co Ltd 画像処理装置

Also Published As

Publication number Publication date
JPS6147362B2 (fr) 1986-10-18

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