JPS52102652A - Pattern inspection apparatus - Google Patents

Pattern inspection apparatus

Info

Publication number
JPS52102652A
JPS52102652A JP1900576A JP1900576A JPS52102652A JP S52102652 A JPS52102652 A JP S52102652A JP 1900576 A JP1900576 A JP 1900576A JP 1900576 A JP1900576 A JP 1900576A JP S52102652 A JPS52102652 A JP S52102652A
Authority
JP
Japan
Prior art keywords
inspection apparatus
pattern inspection
standard
pattern
dimensional pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1900576A
Other languages
Japanese (ja)
Other versions
JPS5651387B2 (en
Inventor
Keiichi Okamoto
Toshimitsu Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1900576A priority Critical patent/JPS52102652A/en
Publication of JPS52102652A publication Critical patent/JPS52102652A/en
Publication of JPS5651387B2 publication Critical patent/JPS5651387B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To inspect automatically a two-dimensional pattern based on co-ordinate data of design without using a standard pattern by using two channel binary video signal corresponding to standard two-dimensional pattern.
COPYRIGHT: (C)1977,JPO&Japio
JP1900576A 1976-02-25 1976-02-25 Pattern inspection apparatus Granted JPS52102652A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1900576A JPS52102652A (en) 1976-02-25 1976-02-25 Pattern inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1900576A JPS52102652A (en) 1976-02-25 1976-02-25 Pattern inspection apparatus

Publications (2)

Publication Number Publication Date
JPS52102652A true JPS52102652A (en) 1977-08-29
JPS5651387B2 JPS5651387B2 (en) 1981-12-04

Family

ID=11987391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1900576A Granted JPS52102652A (en) 1976-02-25 1976-02-25 Pattern inspection apparatus

Country Status (1)

Country Link
JP (1) JPS52102652A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5566067A (en) * 1978-11-03 1980-05-19 Perkin Elmer Corp Inspection device for deeds and the like

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5566067A (en) * 1978-11-03 1980-05-19 Perkin Elmer Corp Inspection device for deeds and the like
JPH0143347B2 (en) * 1978-11-03 1989-09-20 Perkin Elmer Corp

Also Published As

Publication number Publication date
JPS5651387B2 (en) 1981-12-04

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